Product category:
Electric Linear Actuators
News Release from: Aerotech | Subject: WaferMax Z
Edited by the Engineeringtalk Editorial
Team on 25 May 2004
Competitive solution to submicron
positioning
The WaferMax Z vertical lift motorised positioning stage is delivered with a certified straightness/flatness accuracy of +/-2um and a positioning resolution of up to 0.83nm.
The WaferMax Z vertical lift motorised positioning stage is delivered with a certified straightness/flatness accuracy of +/-2um and a positioning resolution of up to 0.83nm and yet its low profile, robust design is suited to demanding production system applications where high performance and competitive price are of prime consideration High bandwidth applications such as laser machining, semiconductor wafer inspection, flat panel display manufacture and many other precision processes in medical device and research fields require components to be positioned vertically with an exceptionally high degree of precision and with near perfect, parallel motion
Typically combined with submicron, horizontal x-y and rotary axes and all associated drives and controls, these applications are becoming increasingly demanding and require positioning systems that will perform in 24/7 production environments, have extremely low maintenance and can be simply integrated into the customers application with minimum cost.
To meet and exceed these considerable demands, the mechanical configuration of the WaferMax Z stage features a low profile wedge and base design secured in a preloaded cross roller bearing system with an integral linear motor and directly coupled high precision encoder.
A lateral stiffness device is used to minimise angular deviation during motion with impressive figures for pitch (20 arc sec), roll (20 arc sec) and yaw (20 arc sec).
With a 5mm travel range, the complete stage is just 50mm high and has a footprint of less than 250 x 210mm including motor and encoder connectors.
In selecting a brushless "cog-free" linear motor rather than a conventional motor and leadscrew design, the WaferMax Z offers high stiffness yet extremely smooth velocity control with an error mapped and calibrated positioning accuracy of +/-1.5um and a bidirectional repeatability of +/-0.5um.
Direct drive technology also means that a maximum speed of 4mm/s is achievable which ensures that components may be rapidly positioned and that high speed precision contouring, in combination with other axes may be realised.
Furthermore the linear motor drive and high resolution encoder system also allows complete in-position stability and extremely smooth slow speed performance.
These characteristics are an absolute requirement for "focusing" applications involving laser or electron beam machining, for dynamic adjustment of flatness in metrology applications and for semiconductor lithography.
The WaferMax Z also features a unique pneumatic counterbalance system to allow heavier load applications of up to 8kg.
The WaferMax Z forms part of a range of products that includes a complementary high precision rotary positioning stage, the WaferMax T that also boasts an equally impressive specification and competitive price.
Typical configurations would combine these stages with x- and y-axis linear motor driven stages supplied as complete systems with the comprehensive range of Aerotech motion controllers and servo amplifiers.
Such systems are supplied complete with motor power and encoder cables and all performance and calibration related documents plus a CD with full interconnection drawings to help integrators with their own system documentation.
In addition, all motor parameter setup data for the software configuration file is included; system commissioning is straightforward, requiring little more than connecting cables and applying power before programming application software.
These features are standard for every Aerotech product, ensuring that the true cost of ownership is extremely competitive. Request a free brochure from Aerotech ...
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