Air-bearing stage is a smooth scanner
An
Aerotech product story
Edited by the Engineeringtalk editorial team
Feb 21, 2008
Air-bearing linear-motor-driven x-y positioning stage is aimed at semiconductor manufacturing and other demanding scan and position applications.
With its open frame design, Aerotech's ABL3600 air-bearing linear-motor-driven x-y positioning stage is aimed at semiconductor fabrication and test, scanning microscopy and other demanding scan and position applications requiring a large working aperture and perfect precision.
Specifications for the 250 x 250mm travel stage include a calibrated positional accuracy of +/-1um, a resolution range between 1 and 200nm, and scanning speeds to 200mm/s.
Delivered as a completely tested and customer ready motion sub system with an integral granite base and full cable management, the ABL3600 can be customised with wafer chucks or other customer-specific fixtures.
The preloaded high-stiffness air bearing design used on the ABL3600, developed and improved over many product generations, has been skilfully combined with the latest technology dual brushless and slotless linear motors to guarantee exceptionally smooth scanning performance and outstanding in-position stability.
The combination of direct-drive servomotors, preloaded air bearings and high resolution noncontact linear encoders provides friction free mechanics with zero-backlash and no wind-up - for a major performance improvement over traditional bearing and mechanical transmission design technologies.
Further benefits of the noncontact design include virtually zero maintenance and an incredibly long working life - contributing to a very low total cost of ownership for such equipment.
Other impressive specifications include a maximum horizontal load capability of 30kg and for each axis, a maximum deviation straightness and flatness of +/-0.5 and +/-1.0um, respectively, measured 50mm above the tabletop.
Pitch and roll is within 3arc-sec and yaw is 0.5arc-sec.
Aerotech provides a choice of PWM or linear drive stage servo amplifiers to match application requirements.
PWM provides high performance acceleration and optimal maximum speed but for applications with the most rigorous in-position stability, submicron axis interpolation or for the lowest possible electrical noise emissions, linear drive stage amplifiers are the superlative choice.
Motion controllers to match such demanding applications include Aerotech's A3200 Automation Platform - a PC based software only multi-axis motion and machine controller with Firewire interfaced, DSP based servo drives and optionally integrated HMI, soft PLC and vision control modules.
The fully deterministic controller can be programmed using Aerotech's own AeroBasic, RS274 G-code and LabView.
Alternatively programmers can call on the powerful Microsoft.Net development environment to help reduce project development timescales with C, C++, VisualBasic or Delphi based programming.
For a stand-alone alternative, Aerotech's new multitasking Ensemble CP/MP/CL intelligent panel mount drives include a single axis motion controller with integrated PWM or linear servo amplifier capable of distributed high-speed serial networking for up to ten tightly synchronised axes.
Aerotech's mechanical systems and motion controls often include custom engineering to adapt standard designs to specific applications.
Modifications include tailored travel ranges, provision for customer supplied cabling and hose, supplying customised machine base, specialised fixtures, control consoles and cabinets.
Custom engineering may also be applied to software commands or program interfacing.
All Aerotech's products are supplied fully tested with certified documentation and with all application specific parameters such as servo amplifier gains and safety settings pre-configured.
Comprehensive pre and post sale technical support includes specialist product training at the customer's site or using internet based tuition.
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Contact Aerotech
Tel +44 118 940 9400
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Worm-drive rotary stages launched by Aerotech
Aerotech has launched a range of precision worm-drive rotary stages featuring large through-apertures and a preload system that provides a high level of accuracy with minimal wear.
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