MEMS devices are put to the test
An
Armstrong Optical product story
Edited by the Engineeringtalk editorial team
Nov 15, 2006
Dynamic characterisation of MEMS devices under operational conditions provides detailed information on the vibration mode shapes and deformations of the devices.
Designed to be used in conjunction with the PhotoMap and ZoomSurf noncontact surface profiling microscope systems, MEMS Solutions from Armstrong Optical allows performance analysis of a broad spectrum of MEMS structures under electrostatic (voltage), piezoelectric (voltage) or thermal (current) actuation over a very wide bandwidth range.
The dynamic characterisation of MEMS devices under operational conditions provides detailed information on the vibration mode shapes and deformations of the devices from 100Hz to 2MHz.
By using stroboscopic illumination the in plane and out-of-plane mode shape dynamics can be "frozen in time" producing amplitude and vibration phase maps that can be compared with the results of finite element analysis.
The addition of the MEMS Vacuum box option allows the characterisation analysis to be performed with variation of vacuum and temperature.
When used alongside the Fogale 3D software the result is an intuitive, interactive and powerful metrology tool providing an extensive range of data analysis solutions.
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