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Precision stages achieve resolutions below 50nm

A Parker Bayside product story
Edited by the Engineeringtalk editorial team Jun 5, 2001

Nanopositioning stages, from Bayside Motion Group, are designed specifically to meet the demanding application requirements of fibre optic alignment, attachment, and component manufacturing processes.

Nanopositioning stages, from Bayside Motion Group, are designed specifically to meet the demanding application requirements of fibre optic alignment, attachment, and component manufacturing processes.

Based upon precision linear and rotary stages, they combine bearings in a small stage with a high resolution linear encoder plus appropriate combinations of piezo and/or brushless DC linear servo motors.

The piezo motor combines the ability to achieve resolutions below 50nm, with absolute position stability, and speeds up to 200mm per second all with long travel lengths.

The piezo motor and encoder are also used to provide precision rotary motion, in a compact package, with direct feedback, for sub-arc second resolution.

The brushless linear servo motor provides smooth motion at speeds below 50 microns per second, with exceptional constant velocity, high force, and a maximum speed of 500mm per second.

Nanopositioning Stages are easily applied in single or multi-axis configurations (X, Y, Z, Theta and Tilt), with modularity to accommodate future production requirements.

The stages operate as a complete servo system and can integrate with standard motion controllers.

All of Bayside's piezo motor driven stages are supplied with a specific amplifier matched to the motor.

Because the amplifier accepts a +10V command signal, the stage can be controlled with almost any motion controller using a PID loop.

Some of the many controllers that work with Bayside's Photonic Stages are; ACS, Delta Tau, Galil, MEI, Nyquist, National Instruments, and others.

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