Positioning stages achieve sub-micron accuracy
A
Parker Bayside product story
Edited by the Engineeringtalk editorial team
Oct 25, 2001
The Bayside 'Ultra' positioning stages feature precision crossed-roller bearing technology for high accuracy, low-friction linear motion and are built with a rugged aluminium construction
The Bayside 'Ultra' positioning stages are designed for applications requiring the highest accuracy.
In addition, being available with a choice from linear motor, ball screw or lead screw drives, the Ultra stages can be supplied to match system-specific requirements, including multi-axis configurations.
The Ultra stages are particularly suitable for applications in the electronics, semiconductor, fibre optic and medical industries.
Ultra stages feature precision crossed-roller bearing technology for high accuracy, low-friction linear motion and are built with a rugged aluminium construction.
Also, there is an option for an open frame for through-stage lighting or inspection.
The linear motor version can achieve sub-micron accuracy with position repeatability of +/- 1 encoder count.
This is complemented by Bayside's patented AutoFlex Preload technology that provides exceptional smoothness of motion for constant velocity requirements in scanning applications.
This results from the elimination of the effects of thermal expansion/contraction on bearing performance.
Further, because the brushless linear motor is mounted inverted, with the ironless coil attached to the stationary base, there are no stressed moving wires.
With the ball screw and lead screw versions servo or stepper motors can be mounted easily using a flexible coupling.
This is because the screws are located along-side the stage.
The ball screw version provides high speed and high force for dynamic move-and-settle applications whilst the lead screw stage offers exceptional smoothness for slow speed scanning.
Both the lead screw and ball screw models are available with linear encoders, providing high positional accuracy and repeatability.
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