Stainless steel belts used in wafer handling
A
Belt Technologies product story
Edited by the Engineeringtalk editorial team
Dec 17, 2001
One of the newest applications of stainless steel belts from Belt Technologies Europe is their use within robotic arm assemblies used for wafer handling in the semi-conductor manufacturing industry.
One of the newest applications of stainless steel belts from Belt Technologies Europe is their use within robotic arm assemblies used for wafer handling in the semi-conductor manufacturing industry.
A combination of properties makes the belts ideal for this application where precision movement and a particulate free operating environment are essential.
Belt Technologies' stainless steel belts provide a highly smooth operation which eliminates the chordal action associated with other types of belts or chains.
This results in precise motion control of the arm's movement.
Stainless steel belts are non-stretchable and have a high modulus of elasticity which is also ideal for the precision positioning required for wafer handling.
The belts also have a pitch accuracy of up to 0.013mm, giving a high degree of accuracy which is invaluable in positioning applications.
Stainless steel belts do not require lubricants as they are a single continuous element, unlike the links of a chain.
Therefore they do not generate airborne particulate through friction and will not introduce foreign substances into the clean room environment.
Indeed Belt's stainless steel belts are recognised as Class100 clean room compatible.
The inherent cleanliness of stainless steel belts compares favourably to alternative flat neoprene belts.
Stainless steel belts also provide better robotic arm strength for higher payloads thereby promoting reliability and giving extra versatility whilst their light weight means substantial space saving may be achieved.
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