Excellent zero stability on rugged manometer
A
Boiswood product story
Edited by the Engineeringtalk editorial team
Jul 19, 2001
Boiswood is now supplying Setra's new Model 760 Vactron capacitance manometer - an absolute pressure transducer designed for accurate and repeatable pressure measurements
Boiswood is now supplying Setra's new Model 760 Vactron capacitance manometer - an absolute pressure transducer designed for accurate and repeatable pressure measurements.
Various full-scale ranges are available from 10 Torr up to 1000 Torr and the units of measurement may be specified in Torr, mBar/hPa, kPa or psia.
Applications include semiconductor processing, laboratory and R and D, test and measurement, metrology, and analytical chemistry and industrial OEM systems.
Excellent zero stability and barometric insensitivity are achieved through the Vactron sensor, which has been developed from Setra's patented variable capacitance sensor.
Superior EMI/RFI performance is achieved using a metal case in conjunction with surge and ESD suppression components and RFI filtering on the inputs and outputs.
The model 760 Vactron has none of the fragile or complex parts found in similar ceramic based capacitance manometers and Inconel is used for all wetted materials allowing it to be used with corrosive gases.
The unit operates from a +/-15 VDC power supply and provides a 0 -10 VDC or 0.5 VDC signal output that is linear with pressure and independent of gas composition.
The electrical connection is available as an industry standard 15 pin D-sub or 6-position terminal strip connector.
An integrated, sliding cover provides easy access to multi-turn potentiometers for fine zero and span adjustments.
A wide range of pressure and vacuum fittings is also available.
The extremely accurate Vactron pressure-sensing element used in the Model 760 has been developed from Setra's patented variable capacitance sensor.
A centrally located feed-through assembly supports a circular electrode in close proximity to the back surface of the diaphragm.
Together the electrode and diaphragm form a variable capacitor within a small reference vacuum chamber maintained at very low pressure by an integrated non-evaporable getter.
As the pressure increases, the diaphragm deflects and the gap between the electrode and the diaphragm reduces, causing an increase in capacitance.
This change in capacitance is detected and converted to a highly accurate linear DC electronic signal by Setra's unique custom integrated circuit, which utilises a patented charge balance principle.
The Model 760 VactronT meets CE Conformance Standards.
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