Seals suit semiconductor specifications
A
Trelleborg Sealing Solutions product story
Edited by the Engineeringtalk editorial team
Jan 25, 2005
The Isolast Fab Range have been developed by Busak+Shamban to meet the ever-increasing demands for sealing within the semiconductor processing industry.
Three new perfluoroelastomer materials, known as the Isolast Fab Range, have been developed by Busak+Shamban to meet the ever-increasing demands for sealing within the semiconductor processing industry: Isolast J9610 for wet processing environments, Isolast J9630 for plasma applications and Isolast J9650 for high temperature wafer processing.
These Fab Range materials, specifically formulated for semiconductor processing applications, compliment the established Isolast perfluoroelastomer portfolio.
Isolast J9610 is a unique formulation providing optimum performance in wet processing environments, including wet etch, wet stripping, wet cleaning, plating, chemical mechanical planarisation (CMP) and ultra pure de-ionised water applications.
Inherent capabilities enable the compound to cope with continuous operating temperatures up to 235C, whilst exhibiting low levels of extractable total organic carbon (TOC).
Isolast J9630 is a material developed for use in plasma processing, exhibiting minimum particulation and extremely low outgassing levels.
It is also resistant to aggressive plasmas and dry process gases in continuous service temperatures up to 260C.
Isolast J9650 is a high temperature compound developed for high temperature wafer-processing applications, including rapid thermal processing, chemical vapour deposition (CVD), diffusion processing, dry plasma etching, dry ashing, metallisation and annealing.
It provides effective sealing operation up to temperatures of 320C.
Isolast Fab Range materials are available in a wide range of sealing profiles to precisely match semiconductor industry requirements, including O-rings, gaskets, custom moulded geometries and bonded components.
Common features of the Fab Range include: ultrahigh purity, extremely low metallic cation extractables, minimum anion impurities, excellent long-term compression set properties and chemical resistance to most media.
For critical applications within semiconductor processing, Isolast Fab Range perfluoroelastomer sealing materials are manufactured in a clean room environment and then cleaned and packed to class 100 standard.
These additional material grades extend the range of products supplied by Busak+Shamban to the semiconductor industry, including PDR (metal housings with bonded PTFE lip), Variseal, Wills rings and standard elastomer sealing solutions.
Not what you're looking for? Search the site.
Google Ads
Contact Trelleborg Sealing Solutions
Related Stories
- Seals suit safety-critical applications
- James Walker designs advanced seat material
- Fitting gives free orientation for hydraulic hoses
- PH30F diaphragm pumps transfer viscous fluids
- Liquid pumps designed for oil, water and chemicals
Browse by category
-
Capital Equipment (3,533)
- Capital Equipment (1)
- Compressors and Air Treatment (546)
- Electrical hardware (131)
- Electronics Manufacturing, Tools, Instruments (192)
- Machinery and Production Equipment (1,133)
- Manufacturing Machinery and Plant Equipment (478)
- Production line blowers and fans (74)
- Robotics, Handling and Storage (978)
- Consultancy and Services (927)
-
Control and Instrumentation (5,142)
- Cabling, Conduit, Signal Conditioning (818)
- CNC and Motion Controllers (190)
- Control and Instrumentation (3)
- HMIs/Operator Interfaces (297)
- Logic Controllers, Timers and Relays (96)
- Mid-range and Large PLCs (204)
- Plant- and Machine-Wide Communications (1,210)
- Plantwide control (1,354)
- Power Supplies, Uninterruptible Power (577)
- Smaller-Sized PLCs (393)
-
Drives, Motors and Controls (3,451)
- Drives, Motors and Controls (2)
- Industrial Drives/Controls (1,293)
- Industrial Motors (502)
- Linear Drives and Motors (121)
- Precision Motors and Gears (434)
- Stepper and Servo Drives, Motors, Controls (1,097)
-
Electrical and Electronic Equipment Design (4,328)
- Batteries, chargers and circuit protection (588)
- Connectors, Terminals, Busbars, Slip Rings (724)
- Electrical and Electronic Components (653)
- Electrical and Electronic Equipment Design (4)
- Electrical and Electronic Subassemblies (377)
- Enclosures and Equipment Cooling Fans (722)
- Knobs, Handles and Enclosure Hardware (430)
- PCs and Embedded Systems (830)
-
Engineering Design Software (6,388)
- 2D CAD software (203)
- 3D CAD software (1,199)
- CAM, CNC, production management software (583)
- Data, document management software (324)
- Electrical design software (168)
- Engineering Design Software (17)
- FEA and structural analysis software (377)
- File conversion software, data capture (358)
- Fluid, thermal, noise, vibration software (340)
- Materials design and moulding design software (153)
- Maths, charting, statistics, QA software (325)
- PLM and collaboration software (665)
- Process, instrumentation, automation software (269)
- Publishing and documentation software (234)
- Rendering, visualisation, styling software (208)
- Simulation, modelling, validation software (965)
-
Engineering Industry News, Resources (6,199)
- Electronic Resources for Engineers (273)
- Engineering Business News, Views (388)
- Engineering Conferences (438)
- Engineering Education, Resources, Standards (851)
- Engineering Exhibitions, Events (578)
- Engineering Guides, Newsletters (354)
- Engineering Industry Developments, Awards (635)
- Engineering Industry News, Resources (4)
- Engineering Industry Reports, Surveys (597)
- Engineering Recruitment, Employment (219)
- Engineering Seminars (421)
- Engineering Training Courses (458)
- Health and Safety Consultancy, Software (180)
- Health and Safety Events, Training, News (285)
- Health and Safety Legislation (403)
- Health and Safety Strategy, Risk Assessment (115)
- Machine Building (4,633)
-
Materials and Processing (3,041)
- Materials and components (2,272)
- Materials and Processing (5)
- Materials processing and testing (292)
- Rapid Prototyping (472)
-
Monitoring, Measurement and Quality (5,682)
- Data Acquisition Hardware and PC I/O Boards (491)
- Data acquisition Software and Communications (505)
- Data loggers (428)
- Electrical and Electronic Testing, PAT Equipment (645)
- Form/co-ordinate, optical, vision instruments (766)
- Gauges, Indicators and Instruments (449)
- Materials testing equipment (439)
- Monitoring, Measurement and Quality (1)
- Telecomms/network test equipment, software etc (159)
- Testing and Calibration Services and Information (522)
- Testing, analysing and monitoring equipment (1,277)
-
Powertrain Design (3,723)
- Bearings (986)
- Chains and belts (334)
- Gears, brakes, couplings and engines (1,482)
- Hydraulic Components (475)
- Lubricants (441)
- Powertrain Design (4)
-
Sensors (7,324)
- Accelerometers and Vibration Sensors (450)
- Barcode Sensors (103)
- Flowmeters and Flow Sensors (650)
- Gas, Chemical, Radiation, Magnetic Sensors (292)
- Humidity and Environmental Sensors (158)
- Level Sensors and Leak Detectors (539)
- Linear Position Sensors (418)
- Loadcells, Force Sensors, Torque Sensors (733)
- Pressure sensors (644)
- Proximity Sensors (715)
- Rotary Position, Tilt and Angular Sensors (567)
- Sensors (12)
- Temperature sensors (626)
- Vision and Colour Sensors (1,417)
- Small Mechanical Components, Joining, Tools (2,059)
- Valves, Pumps, Process Hardware (3,732)
