Pumps are made for semiconductor processing
A
Chemical Process Solutions product story
Edited by the Engineeringtalk editorial team
Feb 13, 2006
A new generation of metal-free pumps caters for all applications in semiconductor processing machinery.
Chemical Process Solutions has offered pumps for the semiconductor industry for a number of years.
Early devices were modified versions of the company's standard diaphragm pump.
But in the early 1990s the Futur I + II were launched on the market, the first pumps developed specifically for the requirements of the semiconductor industry.
The Futur-Plus series followed in 1997 and the Futur-Plus SL in 2000.
Now the company has released the latest generation Futur.
This pump has no metal parts at all, can operate at temperatures to 200C, has no O-ring sealing in wetted areas, has a patented contactless cascade seal, and comes with a 2-years warranty (even on wear parts).
The pump caters for all applications within the semiconductor industry including acids, caustics, slurries and solvents.
The different pump sizes achieve maximum capacities between 10 and 200 litre/min.
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