Sensor sets semiconductor wafers straight
A
Cognex UK product story
Edited by the Engineeringtalk editorial team
Feb 8, 2008
Vision system provides precise noncontact measurement of wafer position and orientation that is faster and more accurate than comparably priced mechanical systems.
New from Cognex, the In-Sight 1820 is a vision-based wafer pre-aligner.
Using proprietary Cognex NotchMax alignment technology, the 1820 vision system provides precise noncontact measurement of wafer position and orientation that is faster and more accurate than comparably priced mechanical systems.
The In-Sight 1820 determines wafer position and orientation in less than half a second, whereas mechanical pre-aligners must typically spin wafers for several seconds.
NotchMax, the newest member of Cognex industry-leading PatMax family of geometric pattern finding technologies, aligns wafers with a centre position accuracy of +/-15um and an orientation accuracy of +/-0.05 degrees.
More accurate pre-alignment saves fine alignment steps inside a process tool to boost throughput.
"Cognex is the world leader in semiconductor high-precision wafer alignment, and the In-Sight 1820 leverages that experience to bring world-class Cognex vision technology to the wafer pre-alignment process", says Marilyn Matz, Cognex Senior VP, Vision Software.
"In addition to throughput and accuracy gains, capital equipment manufacturers will appreciate the system's ability to handle changing wafer sizes and types with simple parameter changes, while semiconductor fabs will like the noncontact design that minimises wafer handling and potential damage to the wafer".
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