Bake and chill platens for wafer processing

Edited by the Engineeringtalk editorial team Jun 14, 2001

Durex Industries manufactures cast aluminum bake and chill platens for wafer processing applications, using a high-density mineral-insulated heating element

Durex Industries, Cary, Illinois, manufactures cast aluminum bake and chill platens for wafer processing applications.

These platens utilize a high-density mineral-insulated heating element, formed to provide a specific heat profile and cast onto 99.7% pure aluminum.

Cooling tubes of various materials can be run systematically with the heat pattern for uniform chill requirements.

Temperature uniformity across the surface of the platens can achieve ?of the maximum operating temperature.

Zero porosity of the castings offers increased operating temperatures to 450*C (850*F).

Helium Leak test specifications of 1 x 108 cc/sec.

are performed to guarantee integrity of the complete assembly.

Precision machining of the platens using CAD/CAM/CAE and CNC manufacturing techniques maintains a flatness tolerance of.0005" and insures exact location of vacuum grooves, channels and hole patterns.

The platen surfaces can be supplied with a hardcoat anodized finish and shipped chem-cleaned and packaged to cleanroom specifications.

Variations of these platen heater designs are typically found in PVD, CVD, etch, strip, photolithography and probe test equipment.

Durex provides rapid prototyping and engineering services for all applications.