Perfluoroelastomer parts outperform old O-rings
A
DuPont (UK) product story
Edited by the Engineeringtalk editorial team
Oct 21, 2003
A new range of seals made with Kalrez perfluoroelastomer parts not only outperform conventional O-rings for slit and gate valve door seal applications, but counter unique problems posed by O-rings.
A new range of bonded door seals made with Kalrez perfluoroelastomer parts not only outperform conventional O-rings for slit and gate valve door seal applications, but counter unique problems posed by O-rings.
They extend seal life and reduce replacement time during preventive maintenance.
Masato Chida, Global Semicon Marketing Manager - Kalrez, said: "DuPont Dow continues to advance sealing technology.
The design of our bonded door seals and the performance of Kalrez Sahara 8085 combine for improved sealing performance".
As an example of optimal seal design, Kalrez bonded door seals are held in a "fixed" position unlike conventional O-rings, which reduces rolling and twisting during door actuation.
The seal design has also been optimised using finite element analysis (FEA) to minimise high concentrations of localised stresses.
As a result, both particle generation and sealing performance are improved significantly over O-rings.
In addition, Kalrez bonded door seals offer quick and easy assembly/disassembly to mounting bracket; eliminate the need to clean the gland during preventive maintenance after the O-ring has been removed; reduce installation problems such as misalignment, and ensure full part traceability with barcode packaging.
The seals also combine a custom seal design along with the excellent plasma resistance of Kalrez Sahara 8085.
The seals are available in Kalrez Sahara 8085 for etch, ash, HDPCVD, PECVD, SACVD and metal CVD wafer processing applications.
Kalrez Sahara 8085 was developed specifically for very low particle generation and low weight loss in various applications.
Customers say that Kalrez Sahara 8085 has improved wafer yield, in some case, up to 200% in applications where highly aggressive environments like NF3 plasma is used in cleaning.
It has not only demonstrated excellent mechanical properties, but also is well suited for both static and dynamic sealing applications such as bonded slit valve doors, bonded gate valve doors, gas inlets, gas orifice seals and gas feed-through seals.
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