Product category:
Materials and components
News Release from: Sabic Innovative Plastics
Edited by the Engineeringtalk Editorial
Team on 03 October 2005
GE delivers complete quartz heater
assemblies
GE's Quartz business has announced an integrated heater assembly platform based at the company's new laboratory in Kobe, Japan. It aims to help chip-makers improve the performance of wafer chambers.
To help optimise the performance of heaters and electrostatic chucks in chip-making equipment, GE's Quartz business has announced an integrated heater assembly platform based at the company's new laboratory in Kobe, Japan These custom assemblies - a critical subsystem of semiconductor equipment manufacturers' wafer chambers - combine customer-specific mechanical, electrical, and thermal engineering with GE's advanced chemical vapour deposited (CVD) ceramic heaters and e-chucks
This article was originally published on Engineeringtalk on 26 Feb 2004 at 8.00am (UK)
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By considering thermal, plasma, mechanical, and electrical boundary conditions of the OEM's chamber, GE's new integrated design process helps optimise the performance of the entire system.
According to Chris Intihar, GE Product Manager, Wafer Processing: "GE has designed a new heater assembly platform with the customer's needs in mind".
"GE's Quartz business is the only known supplier to provide forward integration that will help semiconductor equipment firms improve the performance of the entire wafer chamber, while helping to maximise their internal engineering resources".
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"Our Kobe laboratory offers sophisticated design and testing capabilities and a dedicated technology team to help customers expedite their projects".
"To accelerate this iterative design process, we are leveraging our ceramics materials expertise from GE's Global Research centre in Niskayuna, NY, and our advanced predictive engineering and modelling capabilities from our team at GE's John F.
Welch Technology centre in Bangalore, India".
"Our US plant at our Strongsville, Ohio, world headquarters, and our plant near Himeji City in Japan, also play an integral part of the design and manufacturing process".
The GE technology team at Kobe will deliver complete heater assemblies featuring custom heaters, e-chucks, and industry-standard quartz materials.
GE heaters and e-chucks are mechanically and thermally more robust than sintered ceramic alternatives.
They enable temperature ramp rates exceeding 10C/second with maximum temperatures up to 1300C, and precise temperature control, generally within +/-1%.
These material performance advantages translate into increased throughput, greater process flexibility, and improved wafer yields for semiconductor equipment OEMs.
The Kobe facility, located in the Kobe International Business centre, is equipped with a Class 1000 (measured at 0.3um particulate level) or Class 100 (measured at 0.5um particulate level) clean room, thermal modelling capability, two test chambers capable of generating plasma and measuring electrostatic clamping force, multiple heater power supplies, and infrared cameras.
The new laboratory was officially opened on the 1st July 2005.
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