Product category:
Power Supplies and Uninterruptible Power Supplies
News Release from: Glassman High Voltage | Subject: SPUT for EK and EQ Series
Edited by the Engineeringtalk Editorial
Team on 22 April 2004
High-voltage supplies turn to sputtering
Glassman High Voltage has added a DC sputtering option for its 600W EK and 1.2kW EQ Series power supplies.
Glassman High Voltage has added a DC sputtering option for its 600W EK and 1.2kW EQ Series power supplies This formal release is based on successful demonstration testing of each power supply series at multiple sputtering equipment manufacturer sites as well as a circular magnetron manufacturer during the past 12 months
This article was originally published on Engineeringtalk on 28 Apr 2004 at 8.00am (UK)
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Glassman power supplies are well recognised for their robust operation and high reliability performance in demanding application environments and this new product option is offered with features that meet the specific cathode voltage/power requirements of a wide range of DC magnetron sputtering sources.
The new SPUT option includes a 0-800V DC output voltage at either 750mA or 1.5A dependent on the series, arc quench option for arc management control, and the addition of a constant power control loop so user may have the choice of programming and monitoring via output voltage, output current or output power levels.
Glassman can also meet special customer requests, including different output voltage levels up to 1.5kV, customer specified output connectors or arc count TTL indicator signals as examples.
The EK and EQ Series power supplies are both CE-Mark certified.
These models may also be used for DC-biased RF sputtering and DC sputtering with RF-bias applications in both production and research systems.
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