Product category:
Linear Drives and Motors
News Release from: Heason Technology | Subject: UHV linear motion systems
Edited by the Engineeringtalk Editorial
Team on 23 June 2000
Need to position precisiely in high
vacuum?
Precision linear motion systems for ultra high vacuum conditions (UHV) have been introduced by Heason Technologies Group.
Precision linear motion systems for ultra high vacuum conditions (UHV) have been introduced by Heason Technologies Group They can withstand operation to 1 x 10-10 Torr vacuum levels
This article was originally published on Engineeringtalk on 2 Mar 2001 at 8.00am (UK)
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Based upon Bayside Motion Group linear slides and employing Nanomotion non-magnetic piezo motors, the Heason UHV systems operate with low overall system magnetics.
All mechanical parts are UHV-rated to eliminate outgassing.
Tungsten Disulfide (TD2), a dry UHV compatible lubricant, is applied to all rolling element surfaces, to prevent wear without any vacuum grease.
These compact UHV systems (350mm long) provide full travel for 300mm wafers.
Systems feature crossed roller bearings and non-contact linear encoders to 0.1 micron resolution.
The precision crossed rollers are manufactured in stainless steel to reduce magnetic field effects.
Available in multi-axis configurations, the UHV systems can provide highly accurate horizontal and/or vertical motion.
UHV positioning systems are ideal for a variety of applications requiring precision motion and vacuum compatibility.
Potential applications include electron beam lithography, ion beam lithography, wafer metrology and wafer inspection.
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