Surface analysis system uses multi-axis stage
A
Heason Technology product story
Edited by the Engineeringtalk editorial team
Mar 28, 2001
Thermo VG Scientific's new 'Theta Probe' has an X-ray beam focusing on spots <15um, driven by a multi-axis stage supplied by Heason Technologies Group
Specialist in surface analysis systems, Thermo VG Scientific of East Grinstead has extended its product range to include a machine able to handle larger samples to satisfy new trends, particularly in the semiconductor market.
Based upon X-ray photoelectron spectroscopy (XPS) technology which involves directing an X-ray beam at a sample and then analysing the energy of the emitted photoelectrons, the new 'Theta Probe' is now able to handle samples up to 300mm in diameter whereas previously the maximum size was 70mm.
This larger sample capability has been achieved with no sacrifice to precision, with X-ray beam focusing on spots <15um.
An essential part of the analysis process is the precise movement and positioning of samples to permit accurate surface analysis.
Helping to achieve this capability is a multi-axis stage with X, Y and Z axes supplied by Heason Technologies Group, Chichester.
The X and Y axes are used to position samples for sequential zone analysis whilst the Z axis aids focussing, allowing adjustments according to sample thickness.
Special features of the stage include its ability to operate in the ultra high vacuum environment inside the Theta Probe (1 x 10-10 Torr) and the use of high precision piezo ceramic motors with low magnetic characteristics.
Non-contact linear encoders provide resolution accuracies of 0.1 æm and all mechanical parts are UHV-rated to eliminate outgassing.
By adopting the Heason system with piezo ceramic motors, Thermo VG Scientific has eliminated the use of stepper motors which needed magnetic field screening, saving engineering time and reducing the space envelope required.
Further, because the motors are compatible with standard servo controllers, operation and routine programming is simplified.
It also provides the accuracy benefits offered by closed-loop control.
Thermo VG Scientific's XPS machines are used right across industry for non-destructive analysis of surface impurities, layer thickness, layer uniformity and buried layers.
Heason Technology Group specialises in providing motion control solutions - either in the form of single components or as totally engineered packages complete with purpose written control software.
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