Speed and nanometer-precision from air bearing
A
Heason Technology product story
Edited by the Engineeringtalk editorial team
Nov 29, 2001
Ultra-smooth, high-speed performance combined with nanometer-precision linear motion is provided by a new compact, single-axis, linear air bearing stage from Heason Technologies Group.
Ultra-smooth, high-speed performance combined with nanometer-precision linear motion is provided by a new compact, single-axis, linear air bearing stage from Heason Technologies Group.
Ideal for constant velocity applications, the new 'Neat' AirBeam Air Bearing Linear Motor Stage comprises a high-speed linear servo motor and an air bearing way integrated within a single structural beam.
Performance capabilities include speeds up to 1m/second and accelerations of 1G over standard travels of 15mm up to 2m.
Angular jitter is quoted as <0.1 arc-sec/5mm with global pitch and yaw <15 arc-sec/meter, whilst linear deviation +/- 150 nm over a five second sample.
This exceptionally smooth travel and precise velocity control results from a combination of ultra-smooth, encoder-based, sinusoidal commutation that gives cog-free motion, plus the virtually friction-free motion provided by the latest air bearing technology.
In addition, because the air bearings all but eliminate wear, stage life is almost unlimited.
Position feedback is provided by a non-contact linear encoder with a 0.1 micron resolution that is mounted immediately below the structural beam's upper face to minimise Abb? error.
Heason is the exclusive UK distributor for the Neat range of precision motion and positioning products.
Other Neat products include air bearing, linear motor stages (single and multi axis); compact crossed roller stages; rotary stages; photonic processors with powerful fibre alignment functions; and complete, free-standing gantry positioning systems.
Systems can also be specially engineered for specific applications.
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