Product category:
Mid-range and Large PLCs
News Release from: Horiba Jobin Yvon | Subject: MultiCPM
Edited by the Engineeringtalk Editorial
Team on 16 June 2004
Platform takes control of plasma
processes
Jobin Yvon Horiba Group has released the new MultiCPM platform.
Jobin Yvon Horiba Group has released the new MultiCPM platform This is the second generation of MultiSEM SOFIE instruments from the market leader of in-situ real-time process control and plasma monitoring
This article was originally published on Engineeringtalk on 25 Oct 2000 at 8.00am (UK)
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Performance spectroradiometric system is economic
Jobin Yvon is pleased to introduce the SpectRad Gemini - a dedicated, fully integrated, spectroradiometric system offering high performance at an economical price.
This new instrument offers unique capabilities for significant process enhancements and yield improvements.
Its high-resolution spectrograph allows comprehensive spectral analysis of the plasma for accurate end-point detection on low open area wafers, fault detection and chamber health monitoring.
The Windows based software platform provides intuitive user interaction with the system through comprehensive end-point algorithms and automatic recipe generation procedures, as well as offering the high standards of functionality and reliability that are required in the manufacturing environment.
The modular design of the MultiCPM platform enables multichamber monitoring as well as multisensor diagnosis - such as optical emission spectroscopy (OES), ultraviolet (UV) and laser interferometry and ellipsometry to provide unparallel comprehensive process control.
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