Displacement meters offer microscopic measurements

The Keyence LT-9000 Series of laser confocal displacement meters offer 0.01 micron thickness, profile and angle measurements on transparent objects.

Accurate 0.01 micron thickness measurements are now possible using a single sensor head, even when target surfaces are wet, angled or irregular.

Multiple measurement modes include profile measurement, transparent object thickness measurement, angle measurement and cross-sectional area measurement.

During operation, the LT's 2-micron diameter laser beam is focused on the target surface through an objective lens that vibrates vertically at high speed by means of a tuning fork.

The beam continually reflects off the target surface and converges on a pinhole in the sensor head and then enters the light-receiving element.

By measuring the exact position of the objective lens when the light enters the light-receiving element, the target height can be precisely determined.

The position measurement of an object is obtained only when the laser beam is perfectly focused on the object's surface.

The LT-9000 sensor head incorporates a built-in CCD camera that provides a microscopic image of the target surface.

A cross-hair cursor facilitates precise positioning of the LT's ultra-small, 2-micron beam spot.

A continuous waveform display of topographic surface detail is provided by the built-in microscope.

The LT-9501 controller and monitor provides simple-to-use menus in combination with a handheld remote control unit for operational simplicity.

Typical LT measurement applications include semiconductor, printed circuits, optics, packaging and electrical motors.

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