Product category:
Electric Linear Actuators
News Release from: Lambda Photometrics | Subject: P-517.2C and P-527.2C piezoelectric flexure stages
Edited by the Engineeringtalk Editorial
Team on 03 February 2000
New Multiaxis Piezo Scanning Stages from
PI
Micropositioning specialist Physik Instrumente (PI) introduces the new P-517.2C and P-527.2C piezoelectrically driven flexure stages.
Micropositioning specialist Physik Instrumente (PI) introduces the new P-517.2C and P-527.2C piezoelectrically driven flexure stages Application examples: Semiconductor inspection systems, CD measurement, hard disc test systems, micro-lithography, micro-manufacturing, scanning microscopy, nanopositioning, laser technology
The new stages feature * 100 x 100 and 200 x 200 micron X-Y travel range * Integrated capacitive displacement sensors * Sub-nanometre resolution * Clear aperture 66 x 66 mm.
The short settling time of 10 to 20 ms allows for fast scanning operations.
A variety of digital and analogue controllers is available for OEM and research applications.
Low voltage piezo drives integrated into a sophisticated flexure guidance mechanism provide high guiding precision and zero stiction / friction. Request a free brochure from Lambda Photometrics ...
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