Product category:
Machine Building Components
News Release from: Lambda Photometrics | Subject: Physik Instrumente P-587.6CD
Edited by the Engineeringtalk Editorial
Team on 26 November 2002
Nanopositioning stage for precision
alignment
Lambda Photometrics describes the Physik Instrumente P-587.6CD as the world's most advanced six-axis nano-scanning and nano-alignment system.
Lambda Photometrics describes the Physik Instrumente P-587.6CD as the world's most advanced six-axis nano-scanning and nano-alignment system Providing a linear travel range of 800 x 800 x 200um and rotation ranges of +/-500urad with ultra-high-resolution capacitive sensors, the system is ideal for advanced applications such as nano-metrology, scanning microscopy, optics and mask alignment
This article was originally published on Engineeringtalk on 25 Feb 2000 at 8.00am (UK)
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Typical applications include: metrology, semiconductor inspection systems, CD measurement.
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A large variety of highly integrated digital and analogue low noise closed-loop controllers (benchtop, rackmount or OEM modules) are available to suit any budget or need. Request a free brochure from Lambda Photometrics ...
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