Product category:
Vision and Colour Sensors
News Release from: Lambda Photometrics | Subject: Zygo ZMI 501 and 4004
Edited by the Engineeringtalk Editorial
Team on 24 February 2003
High accuracy for stage metrology boards
The Zygo ZMI 501 and ZMI 4004 measurement electronics offer unmatched stage metrology for OEM applications.
The Zygo ZMI 501 and ZMI 4004 measurement electronics offer unmatched stage metrology for OEM applications The ZMI 501 is an enhanced measurement electronics platform designed for use with Zygo's successful ZMI 500 series of DMI (displacement measurement interferometer) solutions
This article was originally published on Engineeringtalk on 25 Feb 2000 at 8.00am (UK)
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The system's new parallel data output format enables the user to obtain 1.24nm resolution with a two-pass interferometer, while moving at velocities up to 500mm/s.
Four axes of displacement metrology can be measured using two ZMI 501 boards and the high-power 7705 laser option (above 350uW).
High-speed data output features include quadrature, up/down pulses and parallel 32bit.
The platform accommodates 3 or 6U VME and stand-alone interface options - in preference to more changeable PC-based formats.
The ZMI 501 is designed to provide cost effective stage metrology performance for OEMs.
The system's higher velocity ensures increased throughput - with improved resolution resulting in better accuracy and repeatability.
Compact design allows easier integration and a smaller footprint.
Zygo's purpose-designed lasers have an expected lifetime of better than 50kh - significantly reducing operating costs.
DMI solutions are already well established as the essential technology for improving stage position accuracy and control, as measurements are made at the plane of interest, effectively eliminating geometrical and parallax errors.
The ZMI 4004 measurement board has been developed for highest performance applications such as lithography and calibration instrumentation, providing a four-axis solution on a single 6U VME card - and requiring much reduced backplane space.
Designed for use with Zygo's AOM based lasers, the board provides 0.15nm resolution and 2.55m/s velocity with a two-pass interferometer.
Data age uncertainty is +/-0.1ns, providing unmatched dynamic accuracy and synchronisation of all axes.
DMI solutions are critical to ensuring accurate dynamic stage positioning during the lithography process, enabling significantly improved overlay and higher throughputs. Request a free brochure from Lambda Photometrics ...
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