Stages boast picometre resolution
A
Lambda Photometrics product story
Edited by the Engineeringtalk editorial team
Oct 23, 2003
The PI PicoCube is heralded as the world's smallest multi-axis, closed-loop, piezo nanomanipulation and scanning stage family.
The PI PicoCube is heralded as the world's smallest multi-axis, closed-loop, piezo nanomanipulation and scanning stage family.
Typical applications include: biotechnology, nanotechnology, AFM and SPM scanning microscopy, nanomanipulation, nano-imprint, and semiconductor and data-storage test equipment.
P-363 PicoCube x-y and x-y-z piezo stages are ultra-high-performance, closed-loop piezoelectric scanning systems.
Designed for AFM (atomic force microscopy), SPM (scanning probe microscopy) and nanomanipulation applications, they combine an extremely low-inertia (10 kHz resonant frequency) high-speed piezo scanner with noncontact, direct-measuring, parallel-metrology capacitive feedback capable of 50pm resolution.
Based on a parallel-metrology system with capacitive feedback, the compact unit is a design breakthrough in closed-loop piezo scanner technology.
Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for the slightest off-axis motion in real time.
The benefits are reduction of runout and off-axis errors, straighter motion and improved repeatability.
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