Scanning stages take position at speed
A
Lambda Photometrics product story
Edited by the Engineeringtalk editorial team
Dec 2, 2004
The world's fastest high-resolution multi-axis scanning stages are designed for applications in pixel-multiplication, image dithering, scanning microscopy and other high precision uses.
Physik Instrumente (PI) has introduced the world's fastest high resolution multi-axis scanning stages for applications in pixel-multiplication, image dithering, scanning microscopy and other high precision uses.
The P-733 scanning stages provide 0.1nm positioning resolution in x-y and x-y-z axes.
They are able to move in single steps in less than 1ms or run at continuous scanning rates of hundreds of hertz, up to four times the speed of other scanners and with higher precision and resolution.
This superior performance is due to a design using a very stiff direct piezoceramic drive with parallel-kinematic control resulting in a high resonant frequency of 2.3kHz.
The use of capacitive position feedback in a parallel-metrology configuration produces the 0.1nm resolution and also ensures improved straightness of travel.
This technique can monitor all controlled degrees of freedom simultaneously and compensate for the slightest off-axis motion in real time.
The stages are capable of 30um of movement in x and y and 10um in the z-axis.
Negligible EMI is created as piezoceramic actuators do not generate magnetic fields nor are they influenced by them.
An ultra-high-vacuum-compatible version is available as standard.
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