Piezo stages provide precision positioning
A
Lambda Photometrics product story
Edited by the Engineeringtalk editorial team
Jun 24, 2005
New piezo stages with dimensions as small as 30 x 30 x 12mm provide linear travel ranges up to 1mm with subnanometre resolution.
Nanopositioning specialist Physic Instrumente (PI) has introduced the P-620 series of tiny stages with long travel ranges.
The new piezo stages with dimensions as small as 30 x 30 x 12mm provide linear travel ranges up to 1mm with subnanometre resolution.
Designed for high duty-cycle applications, the P-620 series features a zero-maintenance, friction-free guiding system, ceramic encapsulated piezo drives and absolute measurement position sensors.
Digital control with automatic calibration and tracking error elimination is available.
Travel ranges from 50um to 1mm can be provided in single and multiple axis formats with 99.9% linearity and subnanometre solution.
The stage's very stiff design allows faster settling times providing higher throughputs in automation applications.
The 32bit digital controllers offer advanced linearisation algorithms resulting in very fast communications and highly stable position control.
A wide variety of software tools and LabView drivers is included with the controllers.
Some of PI's new piezo stages' applications will be in nanometrology, spectroscopy, scanning microscopy, optics and mask alignment in nanolithography and head/media test systems.
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