Nanopositioning stages shrink to matchbox size
A
Lambda Photometrics product story
Edited by the Engineeringtalk editorial team
Oct 25, 2005
Physik Instrumente now offers a range of nanopositioning stages for applications where space is at a premium.
Physik Instrumente now offers a range of nanopositioning stages for applications where space is at a premium.
These monolithic, high speed products provide resolutions better than 0.1nm in a package smaller than a matchbox.
Despite their small size, the stages incorporate high precision direct metrology capacitive sensors.
Careful attention to mass minimisation results in resonant frequencies up to 3kHz and a significant reduction in inertial recoil forces.
These design features lead to improved system response and stability and submillisecond step and settling times.
For optimised operation and interchangeability of the nanomechanisms and controllers, the stages are equipped with an ID chip holding all calibration data.
This is transferred to the digital controller as soon as the system is powered.
The nanopositioning stages employ a sophisticated zero-friction flexure guidance system providing nanometre level straightness of movement.
They are driven by ceramic-encapsulated piezos for higher reliability and increased lifetimes.
A variety of ultra-low-noise 32bit digital controllers provide high speed communications and are available with a wide selection of software tools.
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