Stage promises best of both worlds
A
Lambda Photometrics product story
Edited by the Engineeringtalk editorial team
Aug 29, 2006
A new z-axis stage offers the unlimited resolution and fast response of piezo drives with the long travel range and high holding force of a servomotor/ballscrew system.
A new z-axis stage available from Lambda Photometrics offers the unlimited resolution and fast response of piezo drives with the long travel range and high holding force of a servomotor/ballscrew system.
The new M-714 precision stage with the C-702 hybrid controller produces a z-axis motion of up to 7mm with a 2nm resolution able to carry loads of up to 10kg.
After movement, settling times to nanometre precision are only milliseconds, with active backlash compensation adding to the precision.
Active compensation of stick/slip during start-up and settling further improves the stage's performance.
The PI C-702 controller can read the stage's position from an integral 2nm precision linear encoder and it continuously activates both the piezo and servomotor drives to provide the best overall operation.
The submillisecond response of the piezo actuators improve velocity control and positioning performance when nanometre level steps need to be executed.
The controller's high speed encoder interface is capable of handling up to 100 million pulses per second and its real time operating system makes the intricacies of the hybrid drive completely transparent to the user.
Interface to the host computer is via a TCP/IP or RS232 making it possible to operate and monitor the system over any compatible network - Internet or intranet.
A 100mm hybrid translation stage is also available.
The new PI stage and controller will find many applications in surface inspection, microscopy, laser technology, interferometry and metrology among others.
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