Low-wavelength laser is fine for microstructures
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Laser Lines (Industrial and Medical) product story
Edited by the Engineeringtalk editorial team
Feb 28, 2002
Laser Lines (I and M) has a new version of the ExciStar M 157nm from TuiLaser.
Laser Lines (I and M) has a new version of the ExciStar M 157nm from TuiLaser.
The fluorine laser offers the shortest commercially available laser wavelength.
Its maximum energy acts as a bright fluorine-star with repetition rates up to 100Hz and average power greater than 1.4W.
Flexible design features make ExciStar M highly reliable with low operating costs.
The implemented laser tube design virtually reduces contamination while increasing the tube lifetime and decreasing operating costs.
The improved model features enhanced window lifetime providing hands-free operation for 30 million pulses.
This is achieved due to a further development of TuiLaser's CeraTube, eliminating the need for time consuming and costly window service.
This means a revolution in the fluorine excimer laser technology.
The improvements of the tube design enhances the window lifetime by more than a factor of 10 compared with other standard excimer lasers! Only F2-lasers - emitting at the very short 157nm wavelength - will enable the smallest achievable structure sizes, which are the key tools in creating microstructures and ablation of interactive materials.
157nm radiation from F2-lasers may extend to well-known advantages of laser-material processing of materials not easily treatable by conventional laser light.
The fluor-version of the ExciStar M fits perfectly for applications like micromachining, photoionisation and spectroscopy, for new fields like lithography and for the next generation of microelectronic chip manufacturing.
The light source is ideal for these applications because of avoiding thermal load and microcracking in the substrate.
Due to the high ablation quality, F2-lasers create new possibilities in downscaling devices for microelectronics, micro-optics and driving industrial and biomedical innovations.
F2-lasers allow unsurpassed accuracy and much lower ablation thresholds in machining of materials such as quartz, PTFE etc.
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Contact Laser Lines (Industrial and Medical)
Tel +44 1295 672500
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