Active cancellation provides ultimate isolation
A
Linos Photonics product story
Edited by the Engineeringtalk editorial team
Sep 9, 2005
The TMC Stacis has become the industry standard for isolating the most vibration-sensitive instruments in noisy environments.
Since the first system was installed at the Massachusetts Institute of Technology, the TMC Stacis has become the industry standard for isolating the most vibration-sensitive instruments in noisy environments.
The advanced Stacis 2100 features all digital controls, improved communications, a user-friendly LCD soft menu, automatic gain adjustment, and easy installation.
Primarily designed to isolate precision microlithography, metrology and inspection equipment in semiconductor factories, Stacis is hundreds of times stiffer than air isolators and suffers from none of their limitations.
There is no soft suspension and, unlike active air systems, Stacis can be "stacked " (placed beneath a tool with an internal active air isolation system).
"The Stacis 2100 is compatible with all internal tool vibration isolation systems and provides the highest level of vibration isolation commercially available", said Steve Ryan, TMC Vice President of Marketing.
"It also enables older and noisier floors to accommodate state-of-the-art tools".
Stacis is a six-degree-of-freedom active cancellation system employing geophones to sense ambient building floor vibration.
Piezoelectric actuators drive the payload with equal and opposite force cancelling vibration from 0.6 to 250Hz.
Stacis can be configured either for OEM integration or as a point-of-use vibration isolation system.
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