Wafer Mapping Sensor simplifies silicon sensing
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Panasonic Electric Works UK product story
Edited by the Engineeringtalk editorial team
Jun 8, 2001
The new UZN21 from Matsushita Electric Works uses LED technology to precisely detect the presence and the position of silicon wafers when mounted in a handling cassette.
The new UZN21 from Matsushita Electric Works uses LED technology to precisely detect the presence and the position of silicon wafers when mounted in a handling cassette.
Nitride-coated wafers absorb light at certain wavelengths depending on coating thickness.
With a conventional laser-mapping sensor, the individual beam may be absorbed resulting in a detection failure.
The LED light source of the UZN21 employs a comparatively wide spectrum of light wavelengths, rather than a single wavelength, resulting in reliable detection of nitride-coated wafers of any thickness.
To achieve this, the UZN21 is equipped with two dual-segment-receiving elements that detect silicon wafers by the position of the reflected light, not by the amount of light reflected.
This unique feature enables the sensor to accurately detect even glass wafers.
A conventional wafer-mapping sensor emits a strong beam of laser light (Class 2 category) which can prove harmful to the human eye.
The innovative LED detection method employed by the UZN21 is much safer than laser mapping devices.
This is because LED emissions are absolutely harmless to the human eye - thus eliminating the need for additional protective screening.
The compact UZN21 measures 80.6 x 18.3 x 50mm and weighs just 75g.
For increased installation flexibility, the UZN21's cable can be routed from any of four different directions and a highly visible beam-spot makes for quick and easy alignment.
Furthermore, the device's fast response time makes it suitable for use in even the most high-speed of wafer-detection applications.
Designed for global use, the UZN21 complies with all relevant international standards.
In addition, the device conveniently allows the user to switch between NPN and PNP output modes, making it suitable for use all over the world.
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