New wafer handler for safe loading
A
McBain Instruments product story
Edited by the Engineeringtalk editorial team
Mar 15, 2007
McBain Instruments introduces new wafer loader for microscopy.
McBain Instruments, a leading supplier of research, inspection and laboratory microscopes, microscopy systems and custom engineering design services, is announcing a newly designed lab tool, the Wafer Handler WL150 and WL200 Series.
The innovative semi-automatic wafer inspection device offers high throughput at 750 WPH with smooth, reliable and safe handling of wafers up to 200mm.
The new, portable apparatus is an updated and upgraded system that replaces the "Ultrastation" wafer handling system, no longer available from Irvine Optical.
Economical and compact, McBain Instruments' new wafer cassettes accommodate either 3" - 6" (WL150) or 5"- 8" (WL200) wafer sizes.
The Class 1 clean room-compatible Wafer Handler also features "smart" stepper motors for the drive axis, motors that provide stall and fault detection, linear stages for smooth and repeatable action and vacuum touch end effectors with sensing capabilities.
The easy-to-mount device facilitates safer wafer handling with user-defined inspection positions and a strategic spring-loaded counterbalance to support the majority of the load without overloading the Z-axis mechanism.
The standard VESA interface makes integration seamless with virtually all major microscopes, optics and inspection devices.
The complete system is provided with an intuitive HMI (Human Machine Interface) control box and numeric keypad.
Ideal for labs and automated work station tasks that require reliable and safe wafer handling and loading.
In full production and shipping now, McBain's Wafer Handler modules are available with a 12-month parts and labor warranty.
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