Sub-micron resolution motion from linear stage
A
Newport Spectra-Physics product story
Edited by the Engineeringtalk editorial team
Jan 31, 2002
A new extruded aluminum linear stage offers 50-250mm travel range and combines fast, sub-micron resolution motion with highly stiff and robust package designs.
The M-ILS Series linear stage offers 50-250 mm travel range and combines fast, sub-micron resolution motion with highly stiff and robust package designs.
Its extruded aluminum body has been optimized to avoid bending effects caused by the different thermal expansion coeffi-cients of the aluminum body and steel rails.
The special U-profile also provides stiffness to the structure while keeping the mass low.
A preloaded, backlash-freeballscrew provides rapid movements with fast step and settling times.
The screw is accurately profiled to reduce heating factors to a minimum and extend the lifetime of the stage.
Recirculating ball bearings slides ensure accurate linear motion and avoid ball cage migration found on linear ball bearings or crossed roller bearings.
Position measurements are read on a 4000 pts/rev.
encoder located directly on the screw to avoid additional screw/motor coupling errors.
For more demanding precision positioning requirements, the CCHA versions feature an integrated linear scale with 0.1um resolution feedback.
The added tachometer provides superior speed stability for slow speed scanning applications and prevents from spontaneuos sub-micron position changes that can be caused by glitches from the commutating brushes of the DC-motor.
An upper rigid cover with flexible side straps prevents damage to the drive train and protects from dust, debris and other pollutants.
M-ILS Series stages also feature a center mounted origin for repeatable initialization, limit switches to prevent over travel, and elastomeric end-of-run dampers for smooth emergency braking.
M-ILS Series Key Features: * Stiff, FEM optimized extruded aluminum body avoids thermal bending effects * Preloaded, backlash-free ballscrew drive allows rapid movements with short step and settling time * Precision recirculating ball bearing slides provide accurate linear motion without ball cage migration * Rigid cover with flexible side bands protect the internal drive mechanism.
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Contact Newport Spectra-Physics
Tel +33 1 60 91 68 68
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