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Stages boast subnanometre resolution

A Newport Spectra-Physics product story
Edited by the Engineeringtalk editorial team Dec 6, 2004

Newport's VP stages have become a reliable solution for the testing and micro assembly of fibre-optical devices, micro-optics, MEMS, cell probes and semiconductors.

Acclaimed for their high-precision and ultracompact size, Newport's VP stages have become a reliable solution for the testing and micro assembly of fibre-optical devices, micro-optics, MEMS, cell probes and semiconductors.

Featuring high-precision drive technology, including low-friction ball screw and recirculating ball bearings, the VP stages deliver highly reliable positioning performance at a maximum speed of 25mm/s.

Compared with alternative direct-drive technologies, the ball screw drive of the VP stages has greater thrust for higher servo stiffness and load capacity, as well as minimum tuning efforts.

Furthermore, the self-locking at power-off considerably simplifies operational safety.

The recently released VP-25XL high-resolution version of these stages now delivers a reliable 10nm motion sensitivity, and better than 140nm bidirectional repeatability, in combination with Newport's XPS motion controller.

These outstanding results are achieved thanks to the advanced encoder interpolation circuitry integrated into the XPS controller that supplies a notable 0.6nm resolution for internal position calculations.

The modular VP-25XA stages are also highly versatile and can be easily set-up in various configurations to create tailor-made motion platforms.

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