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Product category: Stepper and Servo Drives, Motors, Controls
News Release from: Micromech | Subject: Nanomotion ceramic servomotors
Edited by the Engineeringtalk Editorial Team on 14 February 2005

Ceramic servos move piezo technology
further

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The employment of piezo technology in motion and positioning control solutions is not new but the technique employed in Nanomotion's ceramic servomotors is innovative and original.

The employment of piezo technology in motion and positioning control solutions is not new but the technique employed in Nanomotion's ceramic servomotors is innovative and original Many earlier piezo-drive systems use a number of piezo elements arranged in line to step the positioning stage along, by passing the holding force from one to the other sequentially

Other "flexure" types of stage move the load by the amount the element expands when biased by a voltage gradient.

Some fine rotary lead-screw stages employ a "tuning- fork" style operation that causes rotation in a specific direction when a sawtooth waveform is applied to the piezo element.

In other words they can act only as a simple actuator or provide limited rotational speed but none of the above systems are able to effect high speed or forces.

The Nanomotion patented mechanism uses a novel x-y bias on the piezo element to produce an elliptical motion at the driving element tip.

When excited at a carrier frequency of 40kHz with a varying potential, the major axis of the ellipse can be modulated to drive a linear surface at variable speeds using an almost standard servo speed control interface of +/-10V DC.

As the element tip range is around 6um at maximum deflection it is evident that exceedingly slow and smooth motion can be obtained at much lower voltages of bias.

The motor resolutions go down as low as 5nm and 300um/s.

Using a DC mode from the AB 5 amplifier, amazingly the tip can be displaced from +/-10nm to +/-6um and then returned to the original position.

The motors are available from 0.4 to 3.0kg force when coupled in tandem from one drive amplifier can produce linear motion at speeds greater than 300mm/s with forces in excess of 98N.

This makes the motors extremely powerful for fine focusing and stage positioning.

They are now being extensively applied to exacting processes by companies in the semiconductor, communications and pharmaceutical industries, the drive mechanism also lends itself ideally to peripherally driven rotary stages as used in telescopes and precision rotary tables.

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