X-Y stages offer 150nm repeatability
A
Micromech product story
Edited by the Engineeringtalk editorial team
Jan 29, 2008
Alio X-Y stages have a choice of linear servomotors or ceramic servomotors with Renishaw tape scale, Invar scale and or RLE Laser closed loop position.
Alio Industries has released sub micron precision open centre X-Y stages.
These X-Y solutions have a choice of linear servomotors or ceramic servomotors with Renishaw tape scale, Invar scale and or RLE Laser closed loop position.
The open centre x-y designs are available with axes from 25 to 400mm and offer nm repeatability as well as extreme flatness and straightness of motion.
The stages are tested and qualified with a Renishaw ML10 laser interferometer traceable to NIST.
With Invar scales the repeatability is less than 150nm (+/-75nm) with an accuracy less than 1 micron without laser calibration.
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