Moisture analyser monitors fabrication
A
Michell Instruments product story
Edited by the Engineeringtalk editorial team
Nov 20, 2007
The Pura plus is an on-line trace moisture event sensor designed for UHP inert gas applications in semiconductor fabs.
Michell Instruments has released the Pura plus trace moisture event sensor.
The Pura plus is an on-line trace moisture event sensor designed for UHP inert gas applications in semiconductor fabs to allow installation at multiple locations at the final point of entry to the process tool.
Installed in the gas distribution system the Pura plus provides rapid indication of a moisture event as low as 20 parts per billion at 1 part per billion baseline.
To achieve this high speed of response while maintaining sensitivity Michell has invented a detection algorithm and combined it with a newly developed UHP suitable ceramic sensor design.
Besides other benefits it allows the Pura plus to meet the particulate shedding performance required by the semiconductor industry.
The Pura plus meets the highest quality standards for material and surface finish.
It is assembled and packed in a class 100 clean room environment.
Pura Plus is designed to operate reliably and without any maintenance for a minimum of two years.
Information is output via Modbus, with warning and alarm status being indicated with a "traffic light" status indicator LEDs.
The new sensor is Michell Instruments' response to the latest changes in the wafer fabrication industry requirements for device size and specification.
The wafer fabrication industry is continuing to push the technical boundaries in terms of device size and packing density.
The current specification for moisture contaminant level in bulk inert gases is less than 10 parts per billion while there is a pressure on in the industry to reduce this specification to less than 1 parts per billion.
Bulk gas supplies are normally monitored for moisture contamination with large, expensive instruments with low speed of response at the point of entry to the fab.
The moisture contamination from the bulk gas supply is a very rare event.
In contrast to this in the complex distribution system of a fab moisture ingress often takes place downstream of the conventional moisture monitoring point through small leaks, imperfect system design, component failure or via procedural failures.
The small size of the Pura plus makes multiple location installations at point of use a realistic and cost-effective proposition to effectively protect the wafer manufacturing process.
Not what you're looking for? Search the site.
Contact Michell Instruments
Tel +44 1353 658000
Other Michell Instruments stories
-
Hydrocarbon dew-point analysers take control
Michell Instruments has supplied an energy company with hydrocarbon dew-point analysers in order to develop a control solution for the company's natural gas storage site in the UK. -
Michell transmitter simplifies oxygen measurement
Michell has introduced the XTP600 self-contained oxygen transmitter, which is claimed to make oxygen measurement in the process industry as simple as a field-pressure or temperature measurement. -
Michell introduces intrinsically safe transmitter
Michell Instruments has added the Easidew Pro IS to its range of Easidew dew-point transmitters. -
Michell sensor speeds up maintenance of RH devices
Michell Instruments has introduced the I7000 Hygrosmart humidity sensor, which is claimed to make the maintenance of the company's relative-humidity (RH) instruments quick and simple with no downtime. -
Michell oxygen transmitter eliminates drift
Michell is offering thermo-paramagnetic technology that eliminates transmitter drift and deterioration by preventing hydrogen molecules from diffusing into the sensor.
Browse by category
-
Capital Equipment (3,533)
- Capital Equipment (1)
- Compressors and Air Treatment (546)
- Electrical hardware (131)
- Electronics Manufacturing, Tools, Instruments (192)
- Machinery and Production Equipment (1,133)
- Manufacturing Machinery and Plant Equipment (478)
- Production line blowers and fans (74)
- Robotics, Handling and Storage (978)
- Consultancy and Services (927)
-
Control and Instrumentation (5,142)
- Cabling, Conduit, Signal Conditioning (818)
- CNC and Motion Controllers (190)
- Control and Instrumentation (3)
- HMIs/Operator Interfaces (297)
- Logic Controllers, Timers and Relays (96)
- Mid-range and Large PLCs (204)
- Plant- and Machine-Wide Communications (1,210)
- Plantwide control (1,354)
- Power Supplies, Uninterruptible Power (577)
- Smaller-Sized PLCs (393)
-
Drives, Motors and Controls (3,451)
- Drives, Motors and Controls (2)
- Industrial Drives/Controls (1,293)
- Industrial Motors (502)
- Linear Drives and Motors (121)
- Precision Motors and Gears (434)
- Stepper and Servo Drives, Motors, Controls (1,097)
-
Electrical and Electronic Equipment Design (4,328)
- Batteries, chargers and circuit protection (588)
- Connectors, Terminals, Busbars, Slip Rings (724)
- Electrical and Electronic Components (653)
- Electrical and Electronic Equipment Design (4)
- Electrical and Electronic Subassemblies (377)
- Enclosures and Equipment Cooling Fans (722)
- Knobs, Handles and Enclosure Hardware (430)
- PCs and Embedded Systems (830)
-
Engineering Design Software (6,388)
- 2D CAD software (203)
- 3D CAD software (1,199)
- CAM, CNC, production management software (583)
- Data, document management software (324)
- Electrical design software (168)
- Engineering Design Software (17)
- FEA and structural analysis software (377)
- File conversion software, data capture (358)
- Fluid, thermal, noise, vibration software (340)
- Materials design and moulding design software (153)
- Maths, charting, statistics, QA software (325)
- PLM and collaboration software (665)
- Process, instrumentation, automation software (269)
- Publishing and documentation software (234)
- Rendering, visualisation, styling software (208)
- Simulation, modelling, validation software (965)
-
Engineering Industry News, Resources (6,199)
- Electronic Resources for Engineers (273)
- Engineering Business News, Views (388)
- Engineering Conferences (438)
- Engineering Education, Resources, Standards (851)
- Engineering Exhibitions, Events (578)
- Engineering Guides, Newsletters (354)
- Engineering Industry Developments, Awards (635)
- Engineering Industry News, Resources (4)
- Engineering Industry Reports, Surveys (597)
- Engineering Recruitment, Employment (219)
- Engineering Seminars (421)
- Engineering Training Courses (458)
- Health and Safety Consultancy, Software (180)
- Health and Safety Events, Training, News (285)
- Health and Safety Legislation (403)
- Health and Safety Strategy, Risk Assessment (115)
- Machine Building (4,633)
-
Materials and Processing (3,045)
- Materials and components (2,276)
- Materials and Processing (5)
- Materials processing and testing (292)
- Rapid Prototyping (472)
-
Monitoring, Measurement and Quality (5,683)
- Data Acquisition Hardware and PC I/O Boards (491)
- Data acquisition Software and Communications (505)
- Data loggers (428)
- Electrical and Electronic Testing, PAT Equipment (645)
- Form/co-ordinate, optical, vision instruments (766)
- Gauges, Indicators and Instruments (449)
- Materials testing equipment (439)
- Monitoring, Measurement and Quality (1)
- Telecomms/network test equipment, software etc (159)
- Testing and Calibration Services and Information (522)
- Testing, analysing and monitoring equipment (1,278)
-
Powertrain Design (3,724)
- Bearings (986)
- Chains and belts (334)
- Gears, brakes, couplings and engines (1,483)
- Hydraulic Components (475)
- Lubricants (441)
- Powertrain Design (4)
-
Sensors (7,325)
- Accelerometers and Vibration Sensors (450)
- Barcode Sensors (103)
- Flowmeters and Flow Sensors (650)
- Gas, Chemical, Radiation, Magnetic Sensors (292)
- Humidity and Environmental Sensors (158)
- Level Sensors and Leak Detectors (539)
- Linear Position Sensors (418)
- Loadcells, Force Sensors, Torque Sensors (733)
- Pressure sensors (644)
- Proximity Sensors (715)
- Rotary Position, Tilt and Angular Sensors (567)
- Sensors (12)
- Temperature sensors (627)
- Vision and Colour Sensors (1,417)
- Small Mechanical Components, Joining, Tools (2,059)
- Valves, Pumps, Process Hardware (3,733)
