Safety solution for cluster tool pneumatics
A
Norgren product story
Edited by the Engineeringtalk editorial team
Jul 2, 2002
Global pneumatics expert Norgren has developed a stackable lockout valve to help machine builders and end users comply with the new SEMI safety standard S2-0200.
Global pneumatics expert Norgren has developed a stackable lockout valve to help machine builders and end users comply with the new SEMI safety standard S2-0200.
The lock-out tag-out valves provide a simple and inexpensive solution allowing the pneumatics on cluster machines to meet the required standard and continue efficient production.
Each valve on the panel can be configured to individually control one chamber of the machine.
This means that the compressed air supply to pneumatic tools in one chamber can be safely shut off during maintenance while the remaining chambers continue production.
Multiple valves can be actuated simultaneously by using an optional crossbar to shut down more than one chamber or a chamber and the main air supply.
Todd Gaertner, who heads up Norgren's Semiconductor team, said: "The new SEMI standard S2-0200 legislation drove the production of the lockout tag-out valve which is a compact, effective solution easily added to existing equipment or designed into new machines".
Three-way manually operated lockout valves can be locked in the closed position with a standard lockout hasp with a lock shackle diameter up to 8mm.
In the closed position, the valves shut off the airflow between the inlet and outlet ports and exhaust the downstream air.
Technical specifications include a maximum pressure of 10.4bar, a temperature range of -29 to +79C and PTF 0.25in ports for standard fittings.
(This was Engineeringtalk's Top Story on 1 July 2002).
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