MEMS mass flow sensors measure higher flow rates
An
Omron Electronics product story
Edited by the Engineeringtalk editorial team
Sep 5, 2005
Mass flow sensors now include new compact models capable of measuring mass flow velocity and mass flow rate movement with highly repeatable accuracy, at higher flow rates of up to 50 litre/min.
Omron has extended its family of precision MEMS mass flow sensors to include new compact models capable of measuring mass flow velocity and mass flow rate movement with highly repeatable accuracy, at higher flow rates of up to 50 litre/min.
The new sensors are ideal for use in a variety of applications including medical, spectroscopy, scientific/test equipment, industrial processes and environmental comfort control.
Omron is also offering its MEMS flow chip sensor technology as a module for easier integration into OEM type applications (100,000-plus units).
Three new products have been launched: the D6F-10A5-000, D6F-20A5-000 and D6F-50A5-000 (78 x 30 x 30mm), measuring up to 10, 20 and 50 litre/min, mass air-flow, respectively.
Each sensor allows precise detection of mass flows with a resolution of 50mm/s and an accuracy of +/-3% full scale deflection.
Each product uses underside gas entry and exit via 5mm integral channels.
When mounted horizontally with suitable O-rings this maximises precision and ensures stable and repeatable results.
The high sensitivity of the D6F sensors is achieved using a MEMS flow chip.
At only 1.5 x 1.5 x 0.5mm, the MEMS flow chip incorporates two thermopiles either side of a tiny heater element used to measure the deviations in heat symmetry caused by the passing gas flow in either direction.
A thin layer of insulating film protects the sensor chip from exposure to the gas.
When there is no flow, temperature distribution concentrated around the heater is uniform.
When a flow is subjected, temperature on the side of the heater facing the flow cools and on the side away from the flow, warms up (heat symmetry collapses).
This difference of temperature appears as a difference in the thermopile's electromotive force, the mass flow velocity and mass flow rate can be measured.
This flow chip technology is now being offered as a standard and custom OEM sensor module with passage (gas channel architecture), appropriate signal conditioning driver circuit and termination for large quantity applications.
The module can be customised to meet applications in mass and velocity flow, gauge and differential (bypass) pressure.
In the field of medicine, use of Omron's D6F larger direct flow models contributes to overall size reduction, reduced energy consumption and total cost reduction of equipment.
The sensors can be used to carry out precise and reliable measurement of the amount of air and oxygen consumed from respiratory apparatus in surgery (fee collection system) to meet regulatory standards, respiratory and anesthesia ventilators, and portable home care products such as oxygen concentrators and continuous positive airway pressure (CPAP) equipment used to treat obstructive sleep apnea (OSA) disorders.
In commercial, industrial plant and equipment processes, D6F larger flow models can provide very precise measurement of airflows in cleaning and ventilation systems and may also be used in laboratory clean room systems and fume chambers to provide regulated zonal environments and avoid harmful substance leakage.
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