Tiny flow sensor handles large volumes

Omron Electronic Components' D6F-03 unidirectional MEMS mass flow sensor exhibit very stable output performance across the entire scale.

Omron Electronic Components has released the D6F-03 unidirectional MEMS mass flow sensor which uses a thermopile element that converts thermal energy into electrical energy, and is capable of measuring mass airflow up to 3 litres a minute with a +/-5% full-scale repeatable accuracy.

These sensors exhibit very stable output performance across the entire scale.

Through innovative packaging using miniaturisation techniques, these devices measure just 16.8 x 8 x 36.6mm while weighing 5.27.

The D6F-03 series operates on a supply voltage of 10.8 to 26.4V DC while consuming 15mA maximum.

Their output signal is analogue, 1 to 5V DC with load resistance of 10kohm minimum.

The case is composed of moulded thermoplastic and aluminium while the connection is made through a three-pin industry standard connector.

They operate from 0 to +50C with no ice or condensation.

There are many applications using these devices including pick and place systems, leak detection, spectroscopy, mass flow controllers, test equipment, and fuel cells.

"The market was searching for a miniature mass flow sensor for tight packaging applications such as pick and place equipment with multiple heads".

"What Omron did was to take our proven MEMS sensor technology and successfully repackage it", said Cami Marsh, Marketing Communications co-ordinator of Omron Electronic Components.

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