Contamination monitor shows parts-per-trillion
A
Particle Measuring Systems product story
Edited by the Engineeringtalk editorial team
Jan 19, 2007
Airborne molecular contamination monitor is designed for high sensitivity, speed and low cost.
Particle Measuring Systems' newest airborne molecular contamination (AMC) monitor, the AirSentry II, was designed for high sensitivity, speed, and low cost.
Building on the original AirSentry-IMS system, the new ion mobility spectrometry (IMS) cell provides parts-per-trillion sensitivity, fast response, and increased selectivity.
Continuous coverage of a critical monitoring point and a central software platform allow for easy data acquisition and analysis.
Current monitoring techniques, most evolving from a strategy of adapting old technology to contamination applications, are proving inadequate as critical dimensions shrink and lithography tools increase their exposure energy.
Problems such as lack of time resolution, sample transport contamination, and insufficient sensitivity have become increasingly problematic.
Working to resolve these inadequacies, the AirSentry II continuously monitors a critical point with the highest sensitivity offered in a low cost, point-of-use AMC monitor.
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