Servomotor drive provides submicron positioning
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Parker Hannifin - Electromechanical and Drives Division product story
Edited by the Engineeringtalk editorial team
Oct 22, 2003
A new series of miniature linear servomotor driven positioning stages features a height of just 25mm and a width of 80mm, making them the smallest units of their type in the industry.
A new series of miniature linear servomotor driven positioning stages features a height of just 25mm and a width of 80mm, making them the smallest units of their type in the industry.
Known as the MX80L series, these new positioners are completely self-contained, incorporating a novel design of linear servomotor, and a precision optical encoder.
Their exceptionally low profile enables high performance linear servomotors to be applied to space-critical applications that were previously outside the domain of this type of technology.
Typically, these include ultra-precise, submicron motion control in today's fast-growing photonics, biomedical and semiconductor development and manufacturing industries.
The linear servomotor at the heart of the MX80L is a highly innovative, patent-pending, three-phase brushless unit, specifically optimised for force, speed and acceleration.
Unlike competitive stages based on piezoelectric motor technology, the MX80L series is capable of generating a peak force of up to 24N, and operates with industry-standard servo amplifiers and controllers without the need for software "patches" or special control algorithms.
Parker's latest ViX250 intelligent servo drive provides a compact all-digital control companion for MX80L, enabling very high performance multi-axis systems to be configured with ease.
MX80L series linear motor stages are available with a choice of 25, 50, 100 and 150mm travel lengths, and have a normal load capacity of 8kg.
The built-in optical encoder provides submicron resolution, repeatability and accuracy; it offers six selectable resolutions, spanning 10nm to 5um.
Depending on the chosen configuration, the stages are capable of positioning velocities as high as 2m/s, and acceleration rates of up to 5g.
All MX80L series linear motor stages are equipped with precision-ground crossroller bearings to provide extremely smooth and precise linear translation, and feature a unique "zero cage creep" design that is optimised for high-acceleration applications.
Parker offers two performance grades of MX80L, for maximum applications flexibility.
The standard grade version features an aluminium body and carriage, and provides a positioning accuracy of 12um, with a repeatability of +/-0.8um.
The precision grade version has a steel body and carriage for even greater flatness and straightness, uses precision ground mounting surfaces and bearing ways, and is factory laser tested and supplied with a linear slope correction value for optimum results.
It is capable of industry-leading performance, providing an exceptionally high positioning accuracy of 3um, with a repeatability of just +/-0.4um.
Parker's MX80L series are the only miniature linear motor stages on the market to feature a master reference surface, which enables users to align automation processes very precisely by using the travel axis as the actual datum.
Precision dowel holes facilitate highly accurate and repeatable mounting of both the payload and the motor stage itself.
Built-in optical travel limit and home sensors are provided as standard, and are easily adjustable over the entire travel range of the stage.
Furthermore, although there are no moving cables within MX80L series tables - which helps maximise reliability - each table is equipped with a length of high-flex cabling, for use in multi-axis applications.
All MX80L series linear motor stages are rated for 100% duty cycle, making them ideal for today's demanding automation applications.
Both the standard and precision grade versions of the stages are supplied with a low lustre black surface finish, which minimises light reflection in low light optical applications.
A low-ESD electroless nickel coating, which provides a very low resistance path to ground from all surfaces of the MX80L, is available as an option.
Either surface finish may be combined with the option for clean-room preparation, providing solutions for a wide range of application environments.
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