Tool refines MEMS analysis and development

Edited by the Engineeringtalk editorial team Apr 8, 2005

Polytec has developed a powerful new tool for precise 3D dynamic characterisation of microelectromechanical systems and micro-optoelectromechanical microstructures.

Polytec has developed a powerful new tool for precise 3D dynamic characterisation of microelectromechanical systems (MEMS) and micro-optoelectromechanical (MOEMS) microstructures.

A fully integrated, probe head microscope, the MSA-400 Micro System analyser can completely measure and display microstructure motions, simplifying identification of microstructural resonances in all three dimensions.

The combination tool is designed to quickly characterise broadband out-of-plane vibrations with laser Doppler vibrometry and in-plane displacements with stroboscopic video microscopy.

An optional second laser is available for measuring differential out-of-plane vibrations between scanned and fixed locations.

The MSA-400 refines MEMS analysis and development.

Engineering productivity is increased by faster measurements and superior performance over stroboscopic video-only solutions.

The Micro System analyser rapidly detects out-of-plane and in-plane resonances using proprietary, highly sensitive laser-Doppler techniques.

Besides steady state motions, the MSA-400 can measure transient processes using wide-band (pulsed) excitation.

Once the resonant frequency is identified, the stroboscopic video microscopy technique can obtain accurate amplitude and phase information surrounding the resonance and display the results in a Bode plot.

By properly integrating the optics and optimising the optical path and coatings, Polytec engineers have designed the MSA-400 with excellent image quality, high lateral resolution and diffraction-limited probe spots.

The micro system analyser is simple to setup, ready to take data within minutes and easily integrates with probe stations for wafer level measurements.

Vibrational analysis of microstructures for automotive, medical, biochemical, military and aerospace applications has never been simpler or better.