TMS-100 is capable of 20nm resolution
A
Polytec product story
Edited by the Engineeringtalk editorial team
Jun 12, 2009
Polytec has introduced the TMS-100 - a fully automated dimensional metrology measurement system.
TMS-100 is based on scanning white-light interferometry capable of 20nm resolution over a vertical depth of up to 70mm.
Surfaces as large as 37 x 28mm can be measured in a single shot with lateral details as small as 36um.
Software and stages for stitching increase the field of view up to 80 x 80mm.
The system includes: a scanning white-light interferometer; a protective housing with slight positive pressure against dust penetration; and an actively regulated environmental vibration isolation table.
Parameters measured include flatness, parallelism, heights or surface parameters.
The system is particularly applicable to parts with steep edges and deep holes due to its telecentric optical design.
TMS-100, together with the optional automatic workpiece positioner, is ideal for random sampling during in-line quality assurance and supplements other Polytec in-line solutions.
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