Polytec introduces high-frequency vibrometer
Polytec has introduced the UHF-120, an ultra-high frequency vibrometer that features a frequency range of up to 600MHz.
It is suitable for characterising the dynamics of ultra-high frequency micro-system components and ultrasound transducers.
Investigating the dynamics of microstructures, such as micro-electro mechanical systems (MEMS) or piezoelectric ultrasound transducers is an important task both for design verification during development and for routine quality control measurements during manufacture.
The laser Doppler vibrometry optical measurement technique has become an indispensable tool for such characterisation, because it non-invasively provides high-resolution results within milliseconds and is compatible with standard probe stations.
UHF-120 provides both frequency- and time-resolved data, enabling the study of transient response and decay times, for example.
Until now, measurements were limited to approximately 30MHz and to velocities of up to 10m/s.
Polytec is introducing a new product which has extended the frequency range to 600 MHz and the velocity range to more than 100m/s.
UHF-1200 is therefore ideal for examining high-frequency RF-MEMS, or ultrasonic transducers with high precision.
Even tiny structures such as NEMS or other systems at high frequency with short acoustic wavelengths, such as SAW filters, for example, can be characterised with high lateral resolution due to the small focal spot size of the laser beam.
The possibility of resolving high velocities means that it is also possible to characterise high-intensity focused ultrasound transducers.
The UHF-120 laser Doppler vibrometer can be integrated into wafer probe stations, including vacuum probe stations.
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