World's first, totally fluorine-compatible seals
A
Precision Polymer Engineering product story
Edited by the Engineeringtalk editorial team
Oct 31, 2000
The world's first, totally fluorine-compatible seals designed to extend production times between maintenance cycles for equipment used in semiconductor production, is now available.
The world's first, totally fluorine-compatible seals designed to extend production times between maintenance cycles for equipment used in semiconductor production, is now available.
Developed by high performance seals specialist Precision Polymer Engineering (www.prepol.com), the highly pure Perlast Essential G67P seal material is compatible with fluorine-based CIF3 and NF3 chemistries increasingly used in semiconductor manufacturing as well as more traditional wet and dry processes.
Until now seals used in lithography, plasma etching, PVD and CVD processes have been prone to early failure.
High temperatures and corrosive fluorine-based gases, combined with rigorous cleaning cycles, can rapidly degrade seal performance leading to process contamination from impurities and resulting in expensive machine downtime.
Perlast Essential G67P has excellent mechanical properties, comparable with current perfluoroelastomers.
It offers high temperature stability, low compression set and is one of the most chemically inert elastomers available.
The new fluorine-compatible perfluoroelastomer uses a perfluoropolymer filler system without any metallic or carbon-based elements to produce an exceptionally pure elastomer that virtually eliminates any risk of particulation and process contamination.
Getting the right balance between exceptional purity and mechanical performance is the breakthrough in elastomeric technology achieved by Precision Polymer Engineering.
In the past highly pure elastomers have suffered from poor mechanical properties, however the interaction of the filler and elastomer at the nano-scale level in Perlast Essential delivers a new type of perfluoroelastomer.
David Holt, global business manager Perlast, believes the new fluorine-compatible seal material is ideal for the semiconductor industry.
"Advances in semiconductor manufacturing, including 300 mm wafer processing, are placing higher demands on perfluoroelastomer seals.
Perlast Essential G67P will meet these demands and give a marked improvement in productivity by reducing process downtime," he said.
Not what you're looking for? Search the site.
Google Ads
Contact Precision Polymer Engineering
Related Stories
- Parker announces Par<>Fit filter elements
- Tank-cleaning rotary spray ball for CIP tasks
- Spiral hose range enhanced with size -40 model
- Pump Engineering offers aseptic control valve
- Trelleborg launches mechanical face seals
Articles by product category
- Consultancy and Services (903)
- Machine Building (4,517)
-
Engineering Design Software (6,179)
- Engineering Design Software (12)
- 2D CAD software (200)
- 3D CAD software (1,157)
- FEA and structural analysis software (369)
- Fluid, thermal, noise, vibration software (334)
- Simulation, modelling, validation software (914)
- Rendering, visualisation, styling software (196)
- Materials design and moulding design software (151)
- Process, instrumentation, automation software (258)
- Electrical design software (164)
- Publishing and documentation software (229)
- Maths, charting, statistics, QA software (317)
- Data, document management software (310)
- CAM, CNC, production management software (568)
- File conversion software, data capture (351)
- PLM and collaboration software (649)
-
Drives, Motors and Controls (3,361)
- Drives, Motors and Controls (1)
- Precision Motors and Gears (411)
- Industrial Drives/Controls (1,276)
- Linear Drives and Motors (114)
- Industrial Motors (497)
- Stepper and Servo Drives, Motors, Controls (1,060)
- Small Mechanical Components, Joining, Tools (1,975)
-
Control and Instrumentation (5,028)
- Plantwide control (1,324)
- Plant- and Machine-Wide Communications (1,174)
- Smaller-Sized PLCs (387)
- CNC and Motion Controllers (184)
- Mid-range and Large PLCs (201)
- Power Supplies, Uninterruptible Power (562)
- HMIs/Operator Interfaces (294)
- Logic Controllers, Timers and Relays (96)
- Cabling, Conduit, Signal Conditioning (806)
-
Monitoring, Measurement and Quality (5,459)
- Monitoring, Measurement and Quality (1)
- Data acquisition Software and Communications (494)
- Data Acquisition Hardware and PC I/O Boards (472)
- Electrical and Electronic Testing, PAT Equipment (630)
- Form/co-ordinate, optical, vision instruments (703)
- Gauges, Indicators and Instruments (440)
- Data loggers (422)
- Materials testing equipment (421)
- Telecomms/network test equipment, software etc (154)
- Testing and Calibration Services and Information (500)
- Testing, analysing and monitoring equipment (1,222)
-
Electrical and Electronic Equipment Design (4,160)
- Batteries, chargers and circuit protection (555)
- Connectors, Terminals, Busbars, Slip Rings (679)
- Enclosures and Equipment Cooling Fans (709)
- Knobs, Handles and Enclosure Hardware (420)
- PCs and Embedded Systems (798)
- Electrical and Electronic Subassemblies (369)
- Electrical and Electronic Components (630)
-
Materials and Processing (2,963)
- Materials and Processing (5)
- Materials and components (2,215)
- Rapid Prototyping (458)
- Materials processing and testing (285)
-
Engineering Industry News, Resources (6,093)
- Engineering Industry News, Resources (4)
- Engineering Business News, Views (388)
- Engineering Exhibitions, Events (562)
- Engineering Conferences (425)
- Engineering Seminars (400)
- Engineering Industry Developments, Awards (633)
- Engineering Guides, Newsletters (349)
- Engineering Recruitment, Employment (219)
- Engineering Training Courses (433)
- Engineering Education, Resources, Standards (838)
- Engineering Industry Reports, Surveys (597)
- Electronic Resources for Engineers (278)
- Health and Safety Legislation (402)
- Health and Safety Strategy, Risk Assessment (113)
- Health and Safety Consultancy, Software (175)
- Health and Safety Events, Training, News (277)
-
Powertrain Design (3,598)
- Powertrain Design (2)
- Bearings (939)
- Chains and belts (326)
- Gears, brakes, couplings and engines (1,441)
- Hydraulic Components (471)
- Lubricants (418)
-
Capital Equipment (3,387)
- Capital Equipment (1)
- Manufacturing Machinery and Plant Equipment (468)
- Production line blowers and fans (62)
- Compressors and Air Treatment (510)
- Electronics Manufacturing, Tools, Instruments (192)
- Electrical hardware (131)
- Machinery and Production Equipment (1,093)
- Robotics, Handling and Storage (930)
-
Sensors (7,080)
- Sensors (8)
- Accelerometers and Vibration Sensors (427)
- Loadcells, Force Sensors, Torque Sensors (699)
- Pressure sensors (621)
- Flowmeters and Flow Sensors (618)
- Level Sensors and Leak Detectors (527)
- Linear Position Sensors (399)
- Rotary Position, Tilt and Angular Sensors (546)
- Proximity Sensors (700)
- Gas, Chemical, Radiation, Magnetic Sensors (284)
- Humidity and Environmental Sensors (152)
- Temperature sensors (612)
- Vision and Colour Sensors (1,384)
- Barcode Sensors (103)
- Valves, Pumps, Process Hardware (3,623)
