Product category:
Seals
News Release from: Precision Polymer Engineering | Subject: Perlast Essential G67P seal material
Edited by the Engineeringtalk Editorial
Team on 31 October 2000
World's first, totally
fluorine-compatible seals
The world's first, totally fluorine-compatible seals designed to extend production times between maintenance cycles for equipment used in semiconductor production, is now available.
The world's first, totally fluorine-compatible seals designed to extend production times between maintenance cycles for equipment used in semiconductor production, is now available Developed by high performance seals specialist Precision Polymer Engineering (www.prepol.com), the highly pure Perlast Essential G67P seal material is compatible with fluorine-based CIF3 and NF3 chemistries increasingly used in semiconductor manufacturing as well as more traditional wet and dry processes
This article was originally published on Engineeringtalk on 19 Dec 2000 at 8.00am (UK)
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Until now seals used in lithography, plasma etching, PVD and CVD processes have been prone to early failure.
High temperatures and corrosive fluorine-based gases, combined with rigorous cleaning cycles, can rapidly degrade seal performance leading to process contamination from impurities and resulting in expensive machine downtime.
Perlast Essential G67P has excellent mechanical properties, comparable with current perfluoroelastomers.
It offers high temperature stability, low compression set and is one of the most chemically inert elastomers available.
The new fluorine-compatible perfluoroelastomer uses a perfluoropolymer filler system without any metallic or carbon-based elements to produce an exceptionally pure elastomer that virtually eliminates any risk of particulation and process contamination.
Getting the right balance between exceptional purity and mechanical performance is the breakthrough in elastomeric technology achieved by Precision Polymer Engineering.
In the past highly pure elastomers have suffered from poor mechanical properties, however the interaction of the filler and elastomer at the nano-scale level in Perlast Essential delivers a new type of perfluoroelastomer.
David Holt, global business manager Perlast, believes the new fluorine-compatible seal material is ideal for the semiconductor industry.
"Advances in semiconductor manufacturing, including 300 mm wafer processing, are placing higher demands on perfluoroelastomer seals.
Perlast Essential G67P will meet these demands and give a marked improvement in productivity by reducing process downtime," he said.
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