Product category:
Machine Building Components
News Release from: PI (Physik Instrumente) | Subject: Two-axis mirror scanner
Edited by the Engineeringtalk Editorial
Team on 26 November 2002
Long range for PZT steering mirror
Polytec PI, NanoPositioning Group, has released what it claims to be the world's longest-range high-speed PZT-driven two-axis mirror scanner.
Polytec PI, NanoPositioning Group, has released what it claims to be the world's longest-range high-speed PZT-driven two-axis mirror scanner Typical applications include: two-axis laser scanning; steering/stabilisation; image stabilisation; scanning microscopy; compensation of errors in optics; semiconductor test and measurement equipment; metrology; and optical telecommunications
This article was originally published on Engineeringtalk on 10 Dec 2002 at 8.00am (UK)
Related stories
Stages go a long way accurately
Polytec describes Hera as the world's longest-travel precision-guided PZT nanopositioning stages for advanced applications such as mask alignment, inspection and metrology.
The new compact unit provides a scanning (and positioning) range of +/- 1.5 degrees (longer than any other PZT driven system in the market) in two orthogonal axes and one common pivot point.
Unlike conventional two-axis systems, which consist of two single axis units in a serial configuration, this new design is smaller and more accurate.
With a resonant frequency above 1 kHz (with a 10mm-diameter mirror), microradian resolution and a very small housing (1 x 1.3 x 1.5in), the system unites a variety of features into one breakthrough design.
The S-334 is based on PI's 30 years of experience with nanomechanisms and uses high-efficiency, low-voltage PZT solid state actuators with frictionless flexures to provide excellent trajectory control and repeatability.
High-resolution position feedback sensors allow stable operation in dynamic or static applications. Request a free brochure from PI (Physik Instrumente) ...
• PI (Physik Instrumente): contact details and other news
• Email this article to a colleague
• Register for the free Engineeringtalk email newsletter
• Engineeringtalk Home Page
Search the Pro-Talk network of sites
