Product category:
Machine Building Components
News Release from: PI (Physik Instrumente) | Subject: Hera
Edited by the Engineeringtalk Editorial
Team on 10 December 2002
Stages go a long way accurately
Polytec describes Hera as the world's longest-travel precision-guided PZT nanopositioning stages for advanced applications such as mask alignment, inspection and metrology.
Polytec describes Hera as the world's longest-travel precision-guided PZT nanopositioning stages for advanced applications such as mask alignment, inspection and metrology Providing a linear travel range of up to 600um and optional subnanometer-resolution capacitive position feedback in a package as small as 40 x 40 x 15mm, the systems are ideal for advanced applications such as nanometrology, scanning microscopy, optics and mask alignment
This article was originally published on Engineeringtalk on 29 Feb 2008 at 8.00am (UK)
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Stages promise subnanometre resolution
The ability to control motion with millisecond responsiveness and nanometre precision over long travel ranges makes PIHera stages ideal for measuring and QA applications.
Designed for industrial OEM applications, the system features highlights such as a zero-maintenance friction-free flexure guiding system, new solid-state PZT drives with 100% ceramic insulation (a worldwide first) and an optional new digital controller with automatic tracking-error elimination.
These features lead to longer lifetime and faster and more-linear response.
A large variety of high-speed integrated digital and analogue low-noise, closed-loop controllers (bench-top, rack-mount and OEM modules) are available to suit any need or budget. Request a free brochure from PI (Physik Instrumente) ...
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