Stages go a long way accurately
A
PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team
Dec 10, 2002
Polytec describes Hera as the world's longest-travel precision-guided PZT nanopositioning stages for advanced applications such as mask alignment, inspection and metrology.
Polytec describes Hera as the world's longest-travel precision-guided PZT nanopositioning stages for advanced applications such as mask alignment, inspection and metrology.
Providing a linear travel range of up to 600um and optional subnanometer-resolution capacitive position feedback in a package as small as 40 x 40 x 15mm, the systems are ideal for advanced applications such as nanometrology, scanning microscopy, optics and mask alignment.
Designed for industrial OEM applications, the system features highlights such as a zero-maintenance friction-free flexure guiding system, new solid-state PZT drives with 100% ceramic insulation (a worldwide first) and an optional new digital controller with automatic tracking-error elimination.
These features lead to longer lifetime and faster and more-linear response.
A large variety of high-speed integrated digital and analogue low-noise, closed-loop controllers (bench-top, rack-mount and OEM modules) are available to suit any need or budget.
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Contact PI (Physik Instrumente)
Tel +44 1234 756360
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PI nanopositioning stages deliver accurate motion
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