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Piezo scanning stage features longer travel

A PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team May 26, 2004

The P-563.3CD PIMars is a new long-travel piezo scanning/nanomanipulation system.

The P-563.3CD PIMars is a new long-travel piezo scanning/nanomanipulation system.

The unit provides resolution in the nanometre realm and 300 x 300 x 300um travel in x, y and z directions - significantly more than other systems currently available.

Integrated capacitive feedback and closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages.

Typical applications encompass: biotechnology, nanotechnology, SNOMs, AFM and SPM scanning microscopy, nanomanipulation, nano-imprint, semiconductor and data-storage test equipment.

PIMars stages incorporate high-force solid-state piezo actuator drives, frictionless flexure guiding systems and absolute measuring capacitive position sensors.

The high force of the solid-state piezo actuators allows for fast response in the millisecond range and high scanning frequencies.

PIMars stages are based on a different design principle than conventional scanning stages.

The x-y-z system consists of only one moving part, a single module rather than three individual stacked modules, as common in other x-y-z systems.

This "parallel-kinematics" mechanical design is complemented by a parallel-motion metrology feedback system.

With parallel metrology, all sensors "look" at the moving platform "from the outside" and can "see" off-axis and runout errors.

The controller then eliminates unwanted motion in real-time.

Conventional serial-metrology sensors (integrated in each axis) cannot detect off-axis errors.

Parallel motion metrology allows for significantly higher overall x-y-z precision.

Find out more about this article. Request a brochure, download technical specifications and request samples here.

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