Piezo scanning stage features longer travel
A
PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team
May 26, 2004
The P-563.3CD PIMars is a new long-travel piezo scanning/nanomanipulation system.
The P-563.3CD PIMars is a new long-travel piezo scanning/nanomanipulation system.
The unit provides resolution in the nanometre realm and 300 x 300 x 300um travel in x, y and z directions - significantly more than other systems currently available.
Integrated capacitive feedback and closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages.
Typical applications encompass: biotechnology, nanotechnology, SNOMs, AFM and SPM scanning microscopy, nanomanipulation, nano-imprint, semiconductor and data-storage test equipment.
PIMars stages incorporate high-force solid-state piezo actuator drives, frictionless flexure guiding systems and absolute measuring capacitive position sensors.
The high force of the solid-state piezo actuators allows for fast response in the millisecond range and high scanning frequencies.
PIMars stages are based on a different design principle than conventional scanning stages.
The x-y-z system consists of only one moving part, a single module rather than three individual stacked modules, as common in other x-y-z systems.
This "parallel-kinematics" mechanical design is complemented by a parallel-motion metrology feedback system.
With parallel metrology, all sensors "look" at the moving platform "from the outside" and can "see" off-axis and runout errors.
The controller then eliminates unwanted motion in real-time.
Conventional serial-metrology sensors (integrated in each axis) cannot detect off-axis errors.
Parallel motion metrology allows for significantly higher overall x-y-z precision.
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