Product category:
Machine Building Components
News Release from: PI (Physik Instrumente) | Subject: M-110, M-111 and M-112
Edited by the Engineeringtalk Editorial
Team on 12 April 2005
Micropositioning systems boast higher
resolution
M-110, M-111 and M-112 micropositioning systems from PI are very compact, ultra-high-resolution, motorised translation stages providing linear motion of 5, 15 and 25mm.
M-110, M-111 and M-112 micropositioning systems from PI are very compact, ultra-high-resolution, motorised translation stages providing linear motion of 5, 15 and 25mm They deliver 50nm minimum incremental motion and can be equipped with piezo drives for fast scanning and even higher resolution (1nm)
This article was originally published on Engineeringtalk on 26 Nov 2002 at 8.00am (UK)
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Stages go a long way accurately
Polytec describes Hera as the world's longest-travel precision-guided PZT nanopositioning stages for advanced applications such as mask alignment, inspection and metrology.
X, x-y and x-y-z systems are available.
Typical applications include: metrology, micromachining, medical technology, micromanipulation, biotechnology, photonics packaging automation, quality control and test equipment.
The stages were designed to provide a cost effective solution for research and industrial applications.
Lead screws and ball screws (for continuous operation) are offered, driven by stepper motors (lower cost) and closed-loop servomotors (higher precision).
The encoder on the DC servomotor version features 0.007um resolution per count.
Noncontacting precision Hall-effect homing sensors are installed to facilitate automation processes.
Limit switches protect the mechanics from damage.
For applications requiring extremely high resolution or very fast scanning, a closed-loop piezo scanner can be mounted on the stages.
It provides 1nm resolution and response times of a few M-110, M-111 and M-112 can be combined to form x-y, x-z and x-y-z systems for multi-axis positioning and alignment applications.
A large variety of PC-plug-in and stand-alone controllers are offered to suit all needs.
Software for alignment applications is also available. Request a free brochure from PI (Physik Instrumente) ...
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