Nanopositioning for cost-sensitive applications
A
PI (Physik Instrumente) product story
Edited by the Engineeringtalk editorial team
Oct 25, 2005
The P-611 series of x, z, x-z, x-y and x-y-z nanoalignment stages were designed for cost-sensitive applications in research and industry.
The P-611 series of x, z, x-z, x-y and x-y-z nanoalignment stages were designed for cost-sensitive applications in research and industry.
They are based on ultra-low-inertia piezo drives and frictionless flexure guiding systems combining high accuracy and speed.
The P-611 series provides a travel range of 100um per axis with nanometre resolution and high responsiveness - ideal features for positioning and alignment applications from data storage to semiconductors and photonic packaging.
A large variety of models is available: x, x-y, x-z and x-y-z in both open- and closed loop configurations.
The open-loop models are ideal for high-resolution positioning and scanning tasks where an external sensor or optical feedback signal is used, for example in tracking or optical alignment applications.
The closed-loop versions allow absolute position control, high linearity, and repeatability based on the internal high-resolution feedback sensors.
For enhanced precision and stability the integrated strain gauge sensors are mounted on the flexure guiding system.
Easy combination with several PI positioning systems (from manual stages to six-axis motorised positioners) further increases versatility.
Application examples include: nanopositioning, scanning and alignment tasks in data storage, biotechnology, optics, semiconductor technology and photonic packaging.
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Contact PI (Physik Instrumente)
Tel +44 1234 756360
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